JPS6388730U - - Google Patents

Info

Publication number
JPS6388730U
JPS6388730U JP18397286U JP18397286U JPS6388730U JP S6388730 U JPS6388730 U JP S6388730U JP 18397286 U JP18397286 U JP 18397286U JP 18397286 U JP18397286 U JP 18397286U JP S6388730 U JPS6388730 U JP S6388730U
Authority
JP
Japan
Prior art keywords
pressure
air
detection
substrate
detection signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18397286U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542355Y2 (US20030199744A1-20031023-C00003.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986183972U priority Critical patent/JPH0542355Y2/ja
Publication of JPS6388730U publication Critical patent/JPS6388730U/ja
Application granted granted Critical
Publication of JPH0542355Y2 publication Critical patent/JPH0542355Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP1986183972U 1986-11-28 1986-11-28 Expired - Lifetime JPH0542355Y2 (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986183972U JPH0542355Y2 (US20030199744A1-20031023-C00003.png) 1986-11-28 1986-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986183972U JPH0542355Y2 (US20030199744A1-20031023-C00003.png) 1986-11-28 1986-11-28

Publications (2)

Publication Number Publication Date
JPS6388730U true JPS6388730U (US20030199744A1-20031023-C00003.png) 1988-06-09
JPH0542355Y2 JPH0542355Y2 (US20030199744A1-20031023-C00003.png) 1993-10-26

Family

ID=31131203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986183972U Expired - Lifetime JPH0542355Y2 (US20030199744A1-20031023-C00003.png) 1986-11-28 1986-11-28

Country Status (1)

Country Link
JP (1) JPH0542355Y2 (US20030199744A1-20031023-C00003.png)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5311863A (en) * 1976-07-19 1978-02-02 Centro Maskin Goteborg Ab Gas cutting method and device
JPS5322385A (en) * 1976-08-13 1978-03-01 Hitachi Ltd Diffusion type semiconductor pr essure receiving element
JPS53151574U (US20030199744A1-20031023-C00003.png) * 1977-05-06 1978-11-29
JPS5931404A (ja) * 1982-08-16 1984-02-20 Hitachi Ltd 圧力センサ回路

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5311863A (en) * 1976-07-19 1978-02-02 Centro Maskin Goteborg Ab Gas cutting method and device
JPS5322385A (en) * 1976-08-13 1978-03-01 Hitachi Ltd Diffusion type semiconductor pr essure receiving element
JPS53151574U (US20030199744A1-20031023-C00003.png) * 1977-05-06 1978-11-29
JPS5931404A (ja) * 1982-08-16 1984-02-20 Hitachi Ltd 圧力センサ回路

Also Published As

Publication number Publication date
JPH0542355Y2 (US20030199744A1-20031023-C00003.png) 1993-10-26

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