JPS6388635U - - Google Patents
Info
- Publication number
- JPS6388635U JPS6388635U JP18127386U JP18127386U JPS6388635U JP S6388635 U JPS6388635 U JP S6388635U JP 18127386 U JP18127386 U JP 18127386U JP 18127386 U JP18127386 U JP 18127386U JP S6388635 U JPS6388635 U JP S6388635U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- box body
- substrate storage
- magazine
- multiple stages
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 5
- 239000011295 pitch Substances 0.000 claims 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図は本考案の一実施例の側面図、第２図は
従来の一般的半導体基板収納マガジンの正面図、
第３図は半導体基板へ記号付けを行うときの記号
記入台と半導体ウエーハを示す斜視図である。
１……マガジン箱体、２……箱体内側面の凸条
、３……組合せ突起、４……ストツパ、５……半
導体ウエーハ、５ａ……ウエーハ露呈面、６……
記号記入台、７……ウエーハ受け板。
Fig. 1 is a side view of an embodiment of the present invention, Fig. 2 is a front view of a conventional general semiconductor substrate storage magazine,
FIG. 3 is a perspective view showing a symbol marking table and a semiconductor wafer when marking symbols on a semiconductor substrate. DESCRIPTION OF SYMBOLS 1...Magazine box body, 2...Protruding stripes on the side surface of the box interior, 3...Combined protrusion, 4...Stopper, 5...Semiconductor wafer, 5a...Wafer exposed surface, 6...
Symbol entry table, 7...Wafer receiving plate.
Claims (1)
式に多段に収納保持される半導体基板収納マガジ
ンにおいて、前記箱体の背面が前記多段のピツチ
に合せて階段状に形成されていることを特徴とす
る半導体基板収納マガジン。 A semiconductor substrate storage magazine in which a large number of semiconductor substrates are stored and held in multiple stages in a shelf-like manner inside a magazine box body, characterized in that the back surface of the box body is formed in a step shape to match the pitches of the multiple stages. Semiconductor substrate storage magazine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18127386U JPS6388635U (en) | 1986-11-25 | 1986-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18127386U JPS6388635U (en) | 1986-11-25 | 1986-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6388635U true JPS6388635U (en) | 1988-06-09 |
Family
ID=31125990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18127386U Pending JPS6388635U (en) | 1986-11-25 | 1986-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6388635U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017038013A (en) * | 2015-08-12 | 2017-02-16 | 株式会社ディスコ | Housing cassette |
-
1986
- 1986-11-25 JP JP18127386U patent/JPS6388635U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017038013A (en) * | 2015-08-12 | 2017-02-16 | 株式会社ディスコ | Housing cassette |
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