JPS6387826U - - Google Patents
Info
- Publication number
- JPS6387826U JPS6387826U JP18236786U JP18236786U JPS6387826U JP S6387826 U JPS6387826 U JP S6387826U JP 18236786 U JP18236786 U JP 18236786U JP 18236786 U JP18236786 U JP 18236786U JP S6387826 U JPS6387826 U JP S6387826U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- power
- sample
- self
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986182367U JPH0513007Y2 (enExample) | 1986-11-26 | 1986-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986182367U JPH0513007Y2 (enExample) | 1986-11-26 | 1986-11-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6387826U true JPS6387826U (enExample) | 1988-06-08 |
| JPH0513007Y2 JPH0513007Y2 (enExample) | 1993-04-06 |
Family
ID=31128100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986182367U Expired - Lifetime JPH0513007Y2 (enExample) | 1986-11-26 | 1986-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0513007Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001077035A (ja) * | 1999-09-07 | 2001-03-23 | Nec Kyushu Ltd | 半導体製造装置及び半導体製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55118637A (en) * | 1979-03-06 | 1980-09-11 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Plasma etching apparatus |
-
1986
- 1986-11-26 JP JP1986182367U patent/JPH0513007Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55118637A (en) * | 1979-03-06 | 1980-09-11 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Plasma etching apparatus |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001077035A (ja) * | 1999-09-07 | 2001-03-23 | Nec Kyushu Ltd | 半導体製造装置及び半導体製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0513007Y2 (enExample) | 1993-04-06 |