JPS6387826U - - Google Patents

Info

Publication number
JPS6387826U
JPS6387826U JP18236786U JP18236786U JPS6387826U JP S6387826 U JPS6387826 U JP S6387826U JP 18236786 U JP18236786 U JP 18236786U JP 18236786 U JP18236786 U JP 18236786U JP S6387826 U JPS6387826 U JP S6387826U
Authority
JP
Japan
Prior art keywords
electrodes
power
sample
self
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18236786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0513007Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986182367U priority Critical patent/JPH0513007Y2/ja
Publication of JPS6387826U publication Critical patent/JPS6387826U/ja
Application granted granted Critical
Publication of JPH0513007Y2 publication Critical patent/JPH0513007Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1986182367U 1986-11-26 1986-11-26 Expired - Lifetime JPH0513007Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986182367U JPH0513007Y2 (cs) 1986-11-26 1986-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986182367U JPH0513007Y2 (cs) 1986-11-26 1986-11-26

Publications (2)

Publication Number Publication Date
JPS6387826U true JPS6387826U (cs) 1988-06-08
JPH0513007Y2 JPH0513007Y2 (cs) 1993-04-06

Family

ID=31128100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986182367U Expired - Lifetime JPH0513007Y2 (cs) 1986-11-26 1986-11-26

Country Status (1)

Country Link
JP (1) JPH0513007Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001077035A (ja) * 1999-09-07 2001-03-23 Nec Kyushu Ltd 半導体製造装置及び半導体製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55118637A (en) * 1979-03-06 1980-09-11 Chiyou Lsi Gijutsu Kenkyu Kumiai Plasma etching apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55118637A (en) * 1979-03-06 1980-09-11 Chiyou Lsi Gijutsu Kenkyu Kumiai Plasma etching apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001077035A (ja) * 1999-09-07 2001-03-23 Nec Kyushu Ltd 半導体製造装置及び半導体製造方法

Also Published As

Publication number Publication date
JPH0513007Y2 (cs) 1993-04-06

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