JPS6386401U - - Google Patents

Info

Publication number
JPS6386401U
JPS6386401U JP18151086U JP18151086U JPS6386401U JP S6386401 U JPS6386401 U JP S6386401U JP 18151086 U JP18151086 U JP 18151086U JP 18151086 U JP18151086 U JP 18151086U JP S6386401 U JPS6386401 U JP S6386401U
Authority
JP
Japan
Prior art keywords
chamber
output
exhaust
diaphragm
pressure signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18151086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18151086U priority Critical patent/JPS6386401U/ja
Publication of JPS6386401U publication Critical patent/JPS6386401U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
JP18151086U 1986-11-26 1986-11-26 Pending JPS6386401U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18151086U JPS6386401U (cs) 1986-11-26 1986-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18151086U JPS6386401U (cs) 1986-11-26 1986-11-26

Publications (1)

Publication Number Publication Date
JPS6386401U true JPS6386401U (cs) 1988-06-06

Family

ID=31126445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18151086U Pending JPS6386401U (cs) 1986-11-26 1986-11-26

Country Status (1)

Country Link
JP (1) JPS6386401U (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0212000A (ja) * 1988-06-28 1990-01-17 Tokkyo Kiki Kk 位置制御用バルブ
JP2005214243A (ja) * 2004-01-28 2005-08-11 Sp Kenkyusho:Kk ポジショナーのパイロット弁

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0212000A (ja) * 1988-06-28 1990-01-17 Tokkyo Kiki Kk 位置制御用バルブ
JP2005214243A (ja) * 2004-01-28 2005-08-11 Sp Kenkyusho:Kk ポジショナーのパイロット弁
JP4490695B2 (ja) * 2004-01-28 2010-06-30 株式会社エスピー研究所 ポジショナーのパイロット弁

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