JPS6385860U - - Google Patents
Info
- Publication number
- JPS6385860U JPS6385860U JP18225386U JP18225386U JPS6385860U JP S6385860 U JPS6385860 U JP S6385860U JP 18225386 U JP18225386 U JP 18225386U JP 18225386 U JP18225386 U JP 18225386U JP S6385860 U JPS6385860 U JP S6385860U
- Authority
- JP
- Japan
- Prior art keywords
- scan stage
- sample holder
- angle scan
- electron
- axes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004453 electron probe microanalysis Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18225386U JPS6385860U (fr) | 1986-11-26 | 1986-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18225386U JPS6385860U (fr) | 1986-11-26 | 1986-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6385860U true JPS6385860U (fr) | 1988-06-04 |
Family
ID=31127879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18225386U Pending JPS6385860U (fr) | 1986-11-26 | 1986-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6385860U (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH042955A (ja) * | 1990-04-19 | 1992-01-07 | Shimadzu Corp | 表面分析装置 |
| JPH0424544A (ja) * | 1990-05-18 | 1992-01-28 | Motohiro Iwami | 試料表面層の深さ方向への分析方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6039749A (ja) * | 1983-08-12 | 1985-03-01 | Jeol Ltd | 走査電子顕微鏡 |
-
1986
- 1986-11-26 JP JP18225386U patent/JPS6385860U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6039749A (ja) * | 1983-08-12 | 1985-03-01 | Jeol Ltd | 走査電子顕微鏡 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH042955A (ja) * | 1990-04-19 | 1992-01-07 | Shimadzu Corp | 表面分析装置 |
| JPH0424544A (ja) * | 1990-05-18 | 1992-01-28 | Motohiro Iwami | 試料表面層の深さ方向への分析方法 |