JPS6385664U - - Google Patents

Info

Publication number
JPS6385664U
JPS6385664U JP18014786U JP18014786U JPS6385664U JP S6385664 U JPS6385664 U JP S6385664U JP 18014786 U JP18014786 U JP 18014786U JP 18014786 U JP18014786 U JP 18014786U JP S6385664 U JPS6385664 U JP S6385664U
Authority
JP
Japan
Prior art keywords
processing chamber
chamber
wafer
arm
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18014786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0623562Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986180147U priority Critical patent/JPH0623562Y2/ja
Publication of JPS6385664U publication Critical patent/JPS6385664U/ja
Application granted granted Critical
Publication of JPH0623562Y2 publication Critical patent/JPH0623562Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1986180147U 1986-11-21 1986-11-21 エンドステ−シヨン Expired - Lifetime JPH0623562Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986180147U JPH0623562Y2 (ja) 1986-11-21 1986-11-21 エンドステ−シヨン

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986180147U JPH0623562Y2 (ja) 1986-11-21 1986-11-21 エンドステ−シヨン

Publications (2)

Publication Number Publication Date
JPS6385664U true JPS6385664U (US08063081-20111122-C00115.png) 1988-06-04
JPH0623562Y2 JPH0623562Y2 (ja) 1994-06-22

Family

ID=31123838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986180147U Expired - Lifetime JPH0623562Y2 (ja) 1986-11-21 1986-11-21 エンドステ−シヨン

Country Status (1)

Country Link
JP (1) JPH0623562Y2 (US08063081-20111122-C00115.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02294474A (ja) * 1989-04-14 1990-12-05 Leybold Ag カソードスパツタリング装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6280268U (US08063081-20111122-C00115.png) * 1985-11-08 1987-05-22

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6280268U (US08063081-20111122-C00115.png) * 1985-11-08 1987-05-22

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02294474A (ja) * 1989-04-14 1990-12-05 Leybold Ag カソードスパツタリング装置

Also Published As

Publication number Publication date
JPH0623562Y2 (ja) 1994-06-22

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