JPS6384872U - - Google Patents

Info

Publication number
JPS6384872U
JPS6384872U JP17907586U JP17907586U JPS6384872U JP S6384872 U JPS6384872 U JP S6384872U JP 17907586 U JP17907586 U JP 17907586U JP 17907586 U JP17907586 U JP 17907586U JP S6384872 U JPS6384872 U JP S6384872U
Authority
JP
Japan
Prior art keywords
cooling water
discharge lamp
water
cooling
cooled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17907586U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0430763Y2 (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17907586U priority Critical patent/JPH0430763Y2/ja
Publication of JPS6384872U publication Critical patent/JPS6384872U/ja
Application granted granted Critical
Publication of JPH0430763Y2 publication Critical patent/JPH0430763Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Discharge Lamps And Accessories Thereof (AREA)
JP17907586U 1986-11-22 1986-11-22 Expired JPH0430763Y2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17907586U JPH0430763Y2 (zh) 1986-11-22 1986-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17907586U JPH0430763Y2 (zh) 1986-11-22 1986-11-22

Publications (2)

Publication Number Publication Date
JPS6384872U true JPS6384872U (zh) 1988-06-03
JPH0430763Y2 JPH0430763Y2 (zh) 1992-07-24

Family

ID=31121806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17907586U Expired JPH0430763Y2 (zh) 1986-11-22 1986-11-22

Country Status (1)

Country Link
JP (1) JPH0430763Y2 (zh)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007004988A (ja) * 2005-06-21 2007-01-11 Ushio Inc フラッシュランプ装置
JP2010244963A (ja) * 2009-04-09 2010-10-28 Ushio Inc 光源装置
WO2011043009A1 (ja) * 2009-10-06 2011-04-14 パナソニック株式会社 半導体製造装置及びそれを用いた半導体装置の製造方法
JP2014157685A (ja) * 2013-02-14 2014-08-28 Orc Manufacturing Co Ltd 低圧水銀ランプ
JP2015065108A (ja) * 2013-09-26 2015-04-09 岩崎電気株式会社 直接水冷型紫外線ランプ
JP2015065106A (ja) * 2013-09-26 2015-04-09 岩崎電気株式会社 直接水冷型紫外線ランプ
JP2016066559A (ja) * 2014-09-26 2016-04-28 東芝ライテック株式会社 紫外線ランプ
JP2016528023A (ja) * 2013-05-28 2016-09-15 アプライド ライト テクノロジーズ インコーポレイテッド 管状又は他の包囲された構造体の内面の熱処理装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007004988A (ja) * 2005-06-21 2007-01-11 Ushio Inc フラッシュランプ装置
JP2010244963A (ja) * 2009-04-09 2010-10-28 Ushio Inc 光源装置
WO2011043009A1 (ja) * 2009-10-06 2011-04-14 パナソニック株式会社 半導体製造装置及びそれを用いた半導体装置の製造方法
JP2014157685A (ja) * 2013-02-14 2014-08-28 Orc Manufacturing Co Ltd 低圧水銀ランプ
JP2016528023A (ja) * 2013-05-28 2016-09-15 アプライド ライト テクノロジーズ インコーポレイテッド 管状又は他の包囲された構造体の内面の熱処理装置
JP2015065108A (ja) * 2013-09-26 2015-04-09 岩崎電気株式会社 直接水冷型紫外線ランプ
JP2015065106A (ja) * 2013-09-26 2015-04-09 岩崎電気株式会社 直接水冷型紫外線ランプ
JP2016066559A (ja) * 2014-09-26 2016-04-28 東芝ライテック株式会社 紫外線ランプ

Also Published As

Publication number Publication date
JPH0430763Y2 (zh) 1992-07-24

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