JPS6383623A - Laser power monitor mirror - Google Patents
Laser power monitor mirrorInfo
- Publication number
- JPS6383623A JPS6383623A JP23047186A JP23047186A JPS6383623A JP S6383623 A JPS6383623 A JP S6383623A JP 23047186 A JP23047186 A JP 23047186A JP 23047186 A JP23047186 A JP 23047186A JP S6383623 A JPS6383623 A JP S6383623A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- plate
- copper
- reflecting surface
- laser light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims abstract description 10
- 238000005476 soldering Methods 0.000 claims abstract description 6
- 239000002184 metal Substances 0.000 claims description 26
- 229910052751 metal Inorganic materials 0.000 claims description 26
- 238000009792 diffusion process Methods 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 32
- 229910052802 copper Inorganic materials 0.000 abstract description 27
- 239000010949 copper Substances 0.000 abstract description 27
- 229910001006 Constantan Inorganic materials 0.000 abstract description 8
- 230000004044 response Effects 0.000 abstract description 4
- 238000012544 monitoring process Methods 0.000 abstract description 2
- 238000012545 processing Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 7
- 238000000605 extraction Methods 0.000 description 5
- 229910001179 chromel Inorganic materials 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910000809 Alumel Inorganic materials 0.000 description 1
- 206010037660 Pyrexia Diseases 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、レーザエネルギーを利用して各種加工を行う
レーザ加工機等に使用される折り返しミラー、あるいは
加工機内のレーザ共振器に使用される全反射ミラーに入
射するレーザ出力及びこの変動を高速応答性をもってモ
ニターできるレーザパワーモニターミラーに関するもの
である。Detailed Description of the Invention (Field of Industrial Application) The present invention is used for folding mirrors used in laser processing machines that perform various processing using laser energy, or for laser resonators in processing machines. The present invention relates to a laser power monitor mirror that can monitor the laser output incident on a total reflection mirror and its fluctuations with high-speed response.
（従来の技術及び間層点）
レーザエネルギーを利用して金属、非金属材料等を加工
するレーザ加工機において、レーザ出力及びその変動は
け里なパラメータとなる。このレーザ出力の計測で従来
より行なわれている方法は大きく２つに分けられる。(Prior Art and Interlayer Points) In a laser processing machine that uses laser energy to process metals, non-metallic materials, etc., laser output and its fluctuations are important parameters. Conventionally used methods for measuring this laser output can be roughly divided into two.
一つはレーザ発振器から加工用テーブルにレーザ光を導
く途中にレーザ出力計を随時挿入し、間欠的にレーザ出
力をチェックしようとする方法であり、他はビームスプ
リッタ−等でレーザビームの一部を取り出し、それをレ
ーザ出力計に導入する方法である。One method is to insert a laser output meter at any time while guiding the laser beam from the laser oscillator to the processing table, and check the laser output intermittently. This method involves taking out the laser beam and introducing it into a laser output meter.
前者の方法はリアルタイムでレーザ出力を常時監視する
のではな（、定時的なチェック、あるいは何等かの不都
合が生じた時にチェックする間欠的な方法であり、また
高出力レーザ用出力計は高価かつ市販品が少なく、通常
チョッパー等でレーザ出力を分割低減させ、低出力用レ
ーザ出力計で計る方法が一般にとられており、計測系が
複雑になり、かつ計測時に加工ができないという欠点を
有する。The former method does not constantly monitor the laser output in real time (it is a periodic check or an intermittent check when some kind of problem occurs), and output meters for high-power lasers are expensive and expensive. There are few products on the market, and the common method is to reduce the laser output by dividing it with a chopper or the like and measure it with a low-power laser output meter, which has the disadvantage that the measurement system is complicated and processing cannot be performed during measurement.
後者の方法はビームスプリッタ−でレーザ光の一部を取
り出し、それを低出力用レーザ出力計で常時監視可能で
あり、リアルタイムでレーザ出力及びその変動をチェッ
クできるが、高エネルギーにおいてはＺｎ５ｅ等の非常
に高価な材質のビームスプリッタ−が必要となり、レー
ザビームの口径が大きくなると、その材料さえも入手困
難な状況にある。In the latter method, a part of the laser light is taken out with a beam splitter, and it can be constantly monitored with a low-power laser output meter, and the laser output and its fluctuations can be checked in real time. A beam splitter made of a very expensive material is required, and as the diameter of the laser beam increases, even that material is difficult to obtain.
レーザ加工機にはレーザビームの折り返しのため、ある
いはレーザ発生用共振器の全反射ミラー（全反射鏡）と
して、必ず−Ｉ！、属反射ミラーが用いられるが、これ
には熱伝導の良い銅をベースとしたものが多い。Laser processing machines always have a -I! , metal reflective mirrors are used, which are often based on copper, which has good thermal conductivity.
（問題点を解決するための手段）
本発明は、上記のミラーに本来の光を反射させるという
機能のほかに、非常に簡単、堅牢な手段により、入射す
るレーザ光の強度に比例した熱起電力を発生させ、レー
ザ出力のモニターは能をも兼ね備工させたレーザパワー
モニターミラーを提供しようとするものである。(Means for Solving the Problems) In addition to the above-mentioned function of reflecting the original light on the mirror, the present invention also provides a means for generating heat that is proportional to the intensity of the incident laser light by a very simple and robust means. The present invention aims to provide a laser power monitor mirror that is capable of generating electric power and monitoring laser output.
本発明は、レーザ反射面を有する第１の金属板、これと
は５″４種のＰｔ５２の金属板及び前記第１の金属板と
同材質の第３の金属体をはんだ、銀ろう、拡散接合等の
電気的、熱的接触により、サンドイッチ状にはり合わせ
、前記レーザ反射面を有する第１の金属板とｊ！１３の
金属体間の熱起電力を計測することにより、前記レーザ
反射面に入射するレーザ出力をモニター可能にしで、上
記従来技術の間ぶ点を解決しでいる。The present invention includes a first metal plate having a laser reflecting surface, which is a 5" metal plate of four types of Pt52, and a third metal body made of the same material as the first metal plate, by soldering, silver soldering, or diffusion. The first metal plate having the laser reflecting surface and the metal body of j! By making it possible to monitor the laser output incident on the laser beam, the shortcomings of the above-mentioned conventional techniques have been solved.
（作用）
本発明のレーザパワーモニターミラーは、レーザ反射面
を有するｆｊＳｌの金属板が、入射レーザ光のレーザエ
ネルギーの一部を吸収して発熱し、第２の金属板をはさ
んではり合わされたヒートシンク側の第３の金属体との
間に温度差を発生し、第１の金属板と第３の金属体との
間に、その温度差に比例した熱起電力を発生することを
利用してレーザ出力を計測可能としたものである。(Function) In the laser power monitor mirror of the present invention, an fjSl metal plate having a laser reflecting surface absorbs a part of the laser energy of the incident laser beam and generates heat, and is bonded with a second metal plate in between. A temperature difference is generated between the first metal plate and the third metal body on the heat sink side, and a thermoelectromotive force proportional to the temperature difference is generated between the first metal plate and the third metal body. This allows the laser output to be measured.
第１、ｆＩ４２及び第３の金属の材質は、熱電対として
温度に対する直線性の良好な材質が好ましく、銅−フン
スタンタンー銅、フンスタンタン−銅−フンスタンタン
、アルメル−クロメル−アルメルクロメル−アルメル−
クロメル、クロメル−コンスタンタン−クロメル、コン
スタンタン−クロメル−フンスタンクン、鉄−コンスタ
ンタンー鉄、フンスタンタン−鉄−フンスタンクン等の
組み合わせを採用できる。The materials of the first, fI42 and third metals are preferably materials that have good linearity with respect to temperature as thermocouples, such as copper-funstantan-copper, funstantan-copper-funstantan, alumel-chromel-almelchromel-almel-
Combinations such as chromel, chromel-constantan-chromel, constantan-chromel-hunstan, iron-constantan-iron, and hunstantan-iron-hunstan can be employed.
（実施例）
以下、本発明に係るレーザパワーモニターミラーの実施
例を図面に従って説明する。(Example) Hereinafter, an example of the laser power monitor mirror according to the present invention will be described with reference to the drawings.
第１図は本発明のレーザパワーモニターミラーの断面を
示したものである。レーザ反射面Ｒを持つ銅板１、コン
スタンタン板２、及びヒートシンク用銅ブロック３をは
んだ、振ろう、拡散接合（異種金属面を相互に接触させ
圧力と熱を加えて接合する）等で電気的にかつ熱的に接
続し、レーザ反射用銅板１の周辺より、信号取り出し用
の銅線４及びヒートシンク用銅ブロック３から銅線５を
接続して引き出し、温度変化の微少な所で、銅線４及び
５の両端を電圧計等の微少指示計６に接続する。FIG. 1 shows a cross section of a laser power monitor mirror of the present invention. The copper plate 1 with the laser reflective surface R, the constantan plate 2, and the copper block 3 for heat sink are electrically bonded by soldering, shaking, diffusion bonding (dissimilar metal surfaces are brought into contact with each other and bonded by applying pressure and heat), etc. The copper wire 4 for signal extraction and the copper wire 5 are connected and pulled out from the periphery of the copper plate 1 for laser reflection from the copper block 3 for heat sink, and the copper wire 4 is connected thermally in a place where there is a slight temperature change. and 5 are connected to a minute indicator 6 such as a voltmeter.
するとこれは銅−コンスタンクン熱電対と等価となり、
コンスタンタン板２の上下の接合面Ａ及びＢの温度差に
比例した熱起電力が信号取り出し用銅線４，５間に発生
する。また、この温度差はコンスタンクン板２を上下に
貫流する熱流に比例することは良く知られた熱伝導の原
理である。This is then equivalent to a copper-constancoun thermocouple,
A thermoelectromotive force proportional to the temperature difference between the upper and lower joining surfaces A and B of the constantan plate 2 is generated between the signal extraction copper wires 4 and 5. Furthermore, it is a well-known principle of heat conduction that this temperature difference is proportional to the heat flow flowing vertically through the constant plate 2.
ここでレーザ反射面Ｒにレーザ光７を入射させると、は
とんどのレーザ光は反射面Ｒで反射されて反射レーザ光
８となるが、一部（数％以下）のレーザ光は銅板１に吸
収され、その熱流はコンスタンタンＪｆｉ２を貫通し、
ヒートシンク用第ブロックへ３と伝導する。この時フン
スタンクン板上下の温度差に比例した熱起電力が銅線４
，５間に発生する。この電圧は入射したレーザ出力ｌこ
比例しなものとなる。Here, when the laser beam 7 is made incident on the laser reflective surface R, most of the laser beam is reflected by the reflective surface R and becomes reflected laser beam 8, but a portion (less than a few percent) of the laser beam is reflected by the copper plate 1. The heat flow penetrates Constantan Jfi2,
3 and conducts to the heat sink block. At this time, a thermoelectromotive force proportional to the temperature difference between the top and bottom of the copper wire 4
, occurs between 5 and 5. This voltage is proportional to the incident laser output l.
なお、レーザ反射面Ｒを持つ銅板はレーザ反射率を高め
、かつ反射面の酸化を防ぐために金メッキ等を施しても
差し支えない。また、平面のみならず、凸面、凹面ミラ
ーの加工を施しても差し支乏ないことは明らかである。Note that the copper plate having the laser reflective surface R may be plated with gold or the like in order to increase the laser reflectance and prevent the reflective surface from being oxidized. Furthermore, it is clear that there is no harm in processing not only a flat surface but also a convex or concave mirror.
また、ヒートシンク用銅ブロックは空冷あるいは水冷構
造にしても不都合は生じない。それは空気あるいは冷却
水温度が変化し、ミラー全体の温度が多少変化したとし
ても、銅−コンスタンタン熱電灯の直線性は非常に良く
、銅線４，５間に発生する熱起電力はコンスタンタン板
上下の温度差に比例し、ミラー全体の温度にはほとんど
ＰＪ”Ｆを受けないからである。In addition, no problem will arise even if the copper block for the heat sink has an air-cooled or water-cooled structure. Even if the temperature of the air or cooling water changes and the temperature of the entire mirror changes somewhat, the linearity of the copper-constantan thermoelectric lamp is very good, and the thermoelectromotive force generated between the copper wires 4 and 5 is This is because the temperature of the entire mirror is almost not affected by PJ''F.
また、レーザ反射用銅板１と信号取り出し用銅ａ４の接
続箇所は、銅板が厚い場合は一箇所で良く、薄い場合は
第２図のように銅板１の周辺に対称的に多数接続し、そ
れらを再び一箇所で接合することにより、レーザビーム
のミラー入射位置による熱起電力のバラツキを平均化で
きる。In addition, if the copper plate 1 for laser reflection and the copper plate A4 for signal extraction are connected at one place, if the copper plate is thick, it is sufficient to connect them at one place, but if the copper plate is thin, connect them symmetrically in many places around the copper plate 1 as shown in Fig. 2. By joining them again at one place, it is possible to average out variations in thermoelectromotive force due to the laser beam incident position on the mirror.
本発明を実施したところ、レーザ光強度と発生する熱起
電力が非常に良い直線関係にあることかに認できただけ
でなく、時間的応答性が通常のパワーメータより１ケタ
以上速いことも確認された。When the present invention was implemented, not only was it found that there was a very good linear relationship between the laser light intensity and the generated thermoelectromotive force, but also that the time response was more than an order of magnitude faster than a normal power meter. confirmed.
通常のレーザ出力計であれば３秒〜５秒レーザ光を当て
ないと定常値を示さないが、本発明の場合ではレーザ反
射用銅板及びフンスタンタン板を薄くすることにより、
０．１秒〜０．３秒で定常値に達した。A normal laser output meter does not show a steady value unless it is exposed to laser light for 3 to 5 seconds, but in the case of the present invention, by making the laser reflective copper plate and the funstantan plate thinner,
A steady value was reached in 0.1 to 0.3 seconds.
なお、上記実施例の説明では熱電材料として鋸とフンス
タンタンとの組み合わせを例示したが、他の熱電材料、
例えばクロメルとアルメルとの組み合わせとしてもよい
。In addition, in the description of the above embodiment, a combination of a saw and funstantan was exemplified as a thermoelectric material, but other thermoelectric materials,
For example, it may be a combination of chromel and alumel.
（発明の効果）
以上説明したように、本発明のレーザパワーモニターミ
ラーを用いると、従来のように、レーザ出力計、チョッ
パー、ビームスプリッタ−等の機器は必要でなく、レー
ザ加工機に必然的に用いられる金属全反射ミラーのかわ
りにこれを使用することにより、リアルタイムでかつ直
線性、応答性の良い、レーザ出力及びその変動の監視が
容易にできる。(Effects of the Invention) As explained above, when the laser power monitor mirror of the present invention is used, there is no need for conventional equipment such as a laser output meter, chopper, beam splitter, etc., which are necessary for laser processing machines. By using this instead of the metal total reflection mirror used in the 2000-2000, it is possible to easily monitor the laser output and its fluctuations in real time with good linearity and responsiveness.
また、レーザ加工用折り返しミラー、あるいはレーザ発
振用全反射ミラーは、ごみ、油等の付着により、レーザ
反射面が汚れてくることは避けられない。本発明による
レーザパワーモニターミラーな使用することにより、こ
のミラー面の汚れの監視も可能である。それは、レーザ
出力は時間とともに、一般に、低減し、本レーザパワー
モニターミラーからの熱起電力も減少して行くのが正常
であるが、ごみ等が付着した場合、レーザ反射面の吸収
係数が増大し、本レーザパワーモニターミラーから発生
する熱起電力が増加するからである。Further, in a folding mirror for laser processing or a total reflection mirror for laser oscillation, it is inevitable that the laser reflecting surface becomes dirty due to adhesion of dust, oil, etc. By using the laser power monitor mirror according to the present invention, it is also possible to monitor dirt on the mirror surface. It is normal for the laser output to generally decrease and the thermoelectromotive force from this laser power monitor mirror to decrease over time, but if dust etc. adheres, the absorption coefficient of the laser reflective surface increases. However, this is because the thermal electromotive force generated from the present laser power monitor mirror increases.
すなわち、熱起電力が、ある時、極端に大きな値になれ
ば、ミラー面に汚れが付着したと判断できる。That is, if the thermoelectromotive force becomes extremely large at some point, it can be determined that dirt has adhered to the mirror surface.
レーザパワーモニターミラーは非常に簡単、堅牢な構造
のため信頼性に富み、全反射ミラーで吸収された極く一
部のレーザ光を利用しているため、レーザエネルギーの
無駄もなく、かつ高出力になればなるほど熱起電力も大
きくなり、レーザ出力及びミラー面の汚れの監視が容易
になるという特長も有する。The laser power monitor mirror is very simple and highly reliable due to its robust structure. Since it uses only a small portion of the laser light that is absorbed by the total reflection mirror, there is no wastage of laser energy and high output. The thermoelectromotive force also increases as the temperature increases, making it easier to monitor the laser output and dirt on the mirror surface.
さらに本レーザパワーモニターミラーの高速応答性及び
リアルタイム性を利用し、発生した熱起電力を何等かの
方法でレーザ発振器にフィードバックさせることにより
、より安定した高エネルギーレーザ用レーザ発振器の製
作も可能となる。Furthermore, by utilizing the high-speed response and real-time properties of this laser power monitor mirror and feeding back the generated thermoelectromotive force to the laser oscillator in some way, it is possible to create a more stable laser oscillator for high-energy lasers. Become.
１１図は本発明に係るレーザパワーモニターミラーの実
施例を示す正断面図、第２図は本発明のレーザパワーモ
ニターミラーのレーザ反射面から見たレーザ反射用銅版
と信号取り出し用銅線の接合箇所の一例を示す平面図で
ある。
１・・・レーザ反射面を有する胴板、２・・・コンスタ
ンタン板、３・・・ヒートシンク用銅ブロック、４゜５
・・・信号取り出し用銅線、６・・・指示計、７・・・
入射レーザ光、８・・・反射レーザ光、Ａ 、 Ｂ・・
・接合面。Fig. 11 is a front sectional view showing an embodiment of the laser power monitor mirror according to the present invention, and Fig. 2 is a bond between the laser reflecting copper plate and the signal extraction copper wire as seen from the laser reflecting surface of the laser power monitor mirror of the present invention. It is a top view showing an example of a location. 1... Body plate having a laser reflecting surface, 2... Constantan plate, 3... Copper block for heat sink, 4゜5
...Copper wire for signal extraction, 6...Indicator, 7...
Incident laser beam, 8...Reflected laser beam, A, B...
・Joint surface.
Claims (2)
なる材質の第２の金属板及び前記第１の金属板と同材質
の第３の金属体をはんだ、銀ろう、拡散接合等の電気的
、熱的接触により、サンドイッチ状にはり合わせ、前記
レーザ反射面を有する第１の金属板と第３の金属体間の
熱起電力を計測することにより、前記レーザ反射面に入
射するレーザ出力をモニターすることを特徴とするレー
ザパワーモニターミラー。(1) A first metal plate having a laser reflecting surface, a second metal plate made of a different material, and a third metal body made of the same material as the first metal plate, by soldering, silver soldering, diffusion bonding, etc. The first metal plate having the laser reflecting surface and the third metal body are pasted together in a sandwich shape through electrical and thermal contact, and the thermoelectromotive force between the first metal plate and the third metal body is measured, and the laser beam is incident on the laser reflecting surface. A laser power monitor mirror that monitors laser output.
特許請求の範囲第１項記載のレーザパワーモニターミラ
ー。(2) The laser power monitor mirror according to claim 1, wherein the third metal body constitutes a heat sink.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23047186A JPS6383623A (en) | 1986-09-29 | 1986-09-29 | Laser power monitor mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23047186A JPS6383623A (en) | 1986-09-29 | 1986-09-29 | Laser power monitor mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6383623A true JPS6383623A (en) | 1988-04-14 |
| JPH057650B2 JPH057650B2 (en) | 1993-01-29 |
Family
ID=16908340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23047186A Granted JPS6383623A (en) | 1986-09-29 | 1986-09-29 | Laser power monitor mirror |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6383623A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010185839A (en) * | 2009-02-13 | 2010-08-26 | Seiko Instruments Inc | Infrared sensor and thermal image generating apparatus |
| JP2019215167A (en) * | 2018-06-11 | 2019-12-19 | 日亜化学工業株式会社 | Measurement device of light emitting device and measurement method of light emitting device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3738168A (en) * | 1971-11-16 | 1973-06-12 | Us Air Force | Laser beam scanning device |
-
1986
- 1986-09-29 JP JP23047186A patent/JPS6383623A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3738168A (en) * | 1971-11-16 | 1973-06-12 | Us Air Force | Laser beam scanning device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010185839A (en) * | 2009-02-13 | 2010-08-26 | Seiko Instruments Inc | Infrared sensor and thermal image generating apparatus |
| JP2019215167A (en) * | 2018-06-11 | 2019-12-19 | 日亜化学工業株式会社 | Measurement device of light emitting device and measurement method of light emitting device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH057650B2 (en) | 1993-01-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |