JPS63173930A - Apparatus for measuring laser beam energy - Google Patents
Apparatus for measuring laser beam energyInfo
- Publication number
- JPS63173930A JPS63173930A JP62006610A JP661087A JPS63173930A JP S63173930 A JPS63173930 A JP S63173930A JP 62006610 A JP62006610 A JP 62006610A JP 661087 A JP661087 A JP 661087A JP S63173930 A JPS63173930 A JP S63173930A
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- transmission window
- energy
- laser
- laser light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims abstract description 8
- 230000003287 optical effect Effects 0.000 claims abstract description 7
- 230000005540 biological transmission Effects 0.000 claims description 58
- 238000009529 body temperature measurement Methods 0.000 claims description 6
- 239000002184 metal Substances 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 3
- 238000010521 absorption reaction Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000002430 laser surgery Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000007707 calorimetry Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、レーザ光エネルギーの測定または監視を行う
装置に関するもので、たとえばレーザ加工やレーザ手術
装置などの分野において、レーザ光のエネルギーを常時
測定または監視しつつ、レーザ加工およびレーザ手術を
行うことができるものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a device that measures or monitors laser light energy. Laser processing and laser surgery can be performed while being monitored.
従来の技術
従来のレーザ光エネルギーの測定はレーザ光の波長によ
って異なる構成の装置が使われており。Conventional technology Conventional laser beam energy measurement uses devices with different configurations depending on the wavelength of the laser beam.
可視光または波長１ミクロン以下の光の場合には。In the case of visible light or light with a wavelength of 1 micron or less.
ホ））ランジスタや光電管を用いており、一方波長１ミ
クロン以上でしかも高出力の赤外線レーザのレーザ光エ
ネルギーの測定には第３図に示すような構成のものを使
用していた。(e)) Transistors and phototubes were used, while a configuration as shown in Figure 3 was used to measure the laser light energy of a high-output infrared laser with a wavelength of 1 micron or more.
すなわち第３図において、１６は円板状のディスクで、
その表面はレーザ光を良く吸収するように表面処理され
ている。１６は円筒状熱電対材料で、ディスク１５を支
持している。１７は熱容量の大きなヒートシンクで、デ
ィスク１５と円筒状熱電対材料１６とでディスク形熱電
対を形成しており、ディスク１６とヒートシンク１７と
の間の温度差に応じた熱起電１力が発生するようにして
いる。１８は熱起電力を測定するためのリード線である
。このように構成された装置に、矢印Ｅの方向から測定
すべきレーザ光を入射すると１円板状のディスク１６の
表面でレーザ光が吸収される。That is, in FIG. 3, 16 is a disc-shaped disk,
Its surface is treated to absorb laser light well. 16 is a cylindrical thermocouple material that supports the disk 15. 17 is a heat sink with a large heat capacity, and the disk 15 and the cylindrical thermocouple material 16 form a disk-shaped thermocouple, and a thermoelectromotive force is generated according to the temperature difference between the disk 16 and the heat sink 17. I try to do that. 18 is a lead wire for measuring thermoelectromotive force. When a laser beam to be measured is incident on the apparatus configured in this manner from the direction of arrow E, the laser beam is absorbed by the surface of the disk 16 having a circular plate shape.
そして、レーザ光のエネルギーが熱に変換され円板状の
ディスク１６の温度が上昇する。この円板状のディスク
１６に発生した熱は熱電対材料１６を通って、ヒートシ
ンク１７に流れ１円板状のディスク１６とヒートシンク
１７の間には温度差が生じる。そのため１円筒状熱電対
材料１６のリード線１８には前記温度差に対応する熱起
電力が発生し、その熱起電力を測定することにより、入
射レーザ光のエネルギーを測定することができる。Then, the energy of the laser beam is converted into heat, and the temperature of the disc-shaped disk 16 increases. The heat generated in the disc-shaped disk 16 passes through the thermocouple material 16 and flows to the heat sink 17, creating a temperature difference between the disc-shaped disc 16 and the heat sink 17. Therefore, a thermoelectromotive force corresponding to the temperature difference is generated in the lead wire 18 of one cylindrical thermocouple material 16, and by measuring the thermoelectromotive force, the energy of the incident laser beam can be measured.
この方法はカロリメトリー法といわれている方法で、適
当な較正を行うことによって円板状ディスク１６に入射
する光エネルギーの絶対値を測定することができる。This method is called a calorimetry method, and by performing appropriate calibration, it is possible to measure the absolute value of the light energy incident on the disc-shaped disk 16.
発明が解決しようとする問題点
しかしながら、このような従来の構成のものでは、測定
しようとするレーザ光の光軸上に円板状のディスク１６
を配設し、しかも入射レーザ光をすべて吸収することで
レーザ光のエネルギーを測定するため、レーザ加工中や
、レーザ手術中またはその他の各種レーザ実験中等のレ
ーザ光の使用中にレーザ光エネルギーを同時測定するこ
とができないという欠点があった。Problems to be Solved by the Invention However, in such a conventional configuration, a disk-shaped disk 16 is placed on the optical axis of the laser beam to be measured.
In addition, the energy of the laser beam is measured by absorbing all of the incident laser beam, so it is possible to measure the energy of the laser beam during laser processing, laser surgery, or other various laser experiments. The drawback was that simultaneous measurements were not possible.
本発明は、このような問題点を解決するもので。The present invention solves these problems.
各種レーザ実験中や、その他し−ザ加工、レーザ手術な
ど、レーザを使用しながら同時に、使用中のレーザ光エ
ネルギーを測定することができるレーザ光エネルギー測
定装置を提供することを目的とするものである。The purpose of this invention is to provide a laser light energy measurement device that can simultaneously measure the laser light energy during various laser experiments, laser processing, laser surgery, etc. while using the laser. be.
問題点を解決するための手段
このような従来の問題点を解決するために本発明は、入
射したレーザ光を一部吸収する第１と第２の透過窓を互
いに離して同一光軸上に配設し。Means for Solving the Problems In order to solve these conventional problems, the present invention provides that the first and second transmission windows that partially absorb the incident laser light are spaced apart from each other and placed on the same optical axis. Arranged.
前記第１と第２の透過窓のそれぞれに温度測定用センサ
を設け、さらに前記各温度測定用センサ間の出力差を検
出する検出手段と、この検出手段により検出された出力
差をレーザ光の出力値に変換する手段とを設けたもので
ある。A temperature measurement sensor is provided in each of the first and second transmission windows, and a detection means for detecting the output difference between the temperature measurement sensors is provided, and the output difference detected by the detection means is detected by a laser beam. It is provided with means for converting into an output value.
作 用
上記構成によれば、第１と第２の透過窓を互いに離して
レーザ光の同一光軸上に配設しているため、各透過窓が
入射レーザ光の一部を吸収するととにより、熱へのエネ
ルギー変換を行い、この熱による各透過窓の温度上昇が
発生する。この温度上昇は、各透過窓のレーザ光の吸収
率と厚さと入射するレーザ光のエネルギーに関係してお
り、また、レーザ光が各透過窓によって僅かながら吸収
されるため、第１と第２の透過窓の温度上昇に差ができ
る。Effect According to the above configuration, since the first and second transmission windows are spaced apart from each other and arranged on the same optical axis of the laser beam, each transmission window absorbs a portion of the incident laser beam. , converts energy into heat, and this heat causes a temperature rise in each transmission window. This temperature rise is related to the absorption rate and thickness of the laser beam of each transmission window and the energy of the incident laser beam, and also because the laser beam is slightly absorbed by each transmission window. There is a difference in the temperature rise of the transmission window.
したがって、第１の透過窓と第２の透過窓の温度上昇の
差を収ることにより、レーザ光源に近い方の透過窓の吸
収するエネルギーを検出することができる。また、第１
と第２の透過窓の温度上昇の差をとる構成にしており、
雰囲気温度が変動しても第１と第２の透過窓に同時に影
響するため。Therefore, by reducing the difference in temperature rise between the first transmission window and the second transmission window, it is possible to detect the energy absorbed by the transmission window closer to the laser light source. Also, the first
It is configured to take the difference between the temperature rise of the first transmission window and the second transmission window,
This is because even if the ambient temperature changes, it affects the first and second transmission windows simultaneously.
この影響を取り除くことができるのである。その結果、
各透過窓のレーザ光の吸収率や厚さをもとに、入射レー
ザ光のエネルギーを周囲の温度に影響されずに測定する
ことができる。また、透過窓はレーザ光の一部しか吸収
しないため、透過したレーザ光でレーザ加工等の作業を
行うことができるのである。This effect can be removed. the result,
Based on the laser light absorption rate and thickness of each transmission window, the energy of the incident laser light can be measured without being affected by the surrounding temperature. Furthermore, since the transmission window absorbs only a portion of the laser light, it is possible to perform operations such as laser processing using the transmitted laser light.
実施例
以下１本発明の一実施例を第１図および第２図にもとづ
いて説明する。Embodiment One embodiment of the present invention will be described below with reference to FIGS. 1 and 2.
第１図および第２図において、１は第１の透過窓で、こ
の第１の透過窓１は、レーザ光を僅かに吸収する第１の
円板２と、この第１の円板２を保持する熱伝導の良い材
質からなる第１の保持枠３とで構成しており、第１の透
過窓１を支持台４で保持している。そして、第１の透過
窓１と隣接させて吸収率と厚さが等しい第２の透過窓６
を設けている。この第２の透過窓６は、第１の円板２と
同じ吸収率の第２の円板６と、この第２の円板６を保持
する熱伝導の良い材質からなる第２の保持枠７とで構成
しており、第２の透過窓６を支持台８で保持している。In FIGS. 1 and 2, 1 is a first transmission window, and this first transmission window 1 includes a first disc 2 that slightly absorbs laser light, and a first disc 2 that absorbs laser light slightly. A first holding frame 3 made of a material with good thermal conductivity holds the first transmission window 1, and a support base 4 holds the first transmission window 1. Then, a second transmission window 6 adjacent to the first transmission window 1 and having the same absorption rate and thickness is provided.
has been established. This second transmission window 6 includes a second disc 6 having the same absorption rate as the first disc 2, and a second holding frame made of a material with good thermal conductivity that holds this second disc 6. 7, and the second transparent window 6 is held by a support stand 8.
さらに、第１の透過窓１と第２の透過窓６とを同一光軸
上の一定距離だけ離して外枠９で配設しており、この外
枠９は断熱材で形成されて、第１の透過窓１と第２の透
過窓６とを熱的に絶縁している。そして、第１の保持枠
３と第２の保持枠７の間には、熱電対を構成する第１の
金属線１０を接続しており、第１と第２の保持枠３と７
にはそれぞれ熱電対の接続点に熱電対を構成する第２の
金属線１１ａと１１ｂを接続している。この第２の金属
線１１ａと１１ｂの間には、熱電対の出力差を検出する
検出回路１２を接続しており、さらに、この検出回路１
２で検出した信号を入射レーザ光１３のエネルギー値（
出力値）として変換と表示を行う変換表示部１４を検出
回路１２に接続している。Furthermore, the first transmission window 1 and the second transmission window 6 are arranged on the same optical axis and separated by a certain distance by an outer frame 9, and this outer frame 9 is made of a heat insulating material. The first transmission window 1 and the second transmission window 6 are thermally insulated. A first metal wire 10 constituting a thermocouple is connected between the first holding frame 3 and the second holding frame 7.
Second metal wires 11a and 11b constituting the thermocouple are connected to the connection points of the thermocouple, respectively. A detection circuit 12 for detecting the output difference of the thermocouple is connected between the second metal wires 11a and 11b.
The signal detected in step 2 is converted to the energy value of the incident laser beam 13 (
A conversion display section 14 that converts and displays an output value (output value) is connected to the detection circuit 12.
次にレーザ光のエネルギーを測定する場合の動作を説明
する。入射エネルギーＥＯのレーザ光１３ａが第１の透
過窓１に入射すると、第１の透過窓１の吸収率をβ、厚
さをｌとして、透過するパワーＥ１ は次のように表わ
せる。Next, the operation when measuring the energy of laser light will be explained. When the laser beam 13a with incident energy EO enters the first transmission window 1, the transmitted power E1 can be expressed as follows, where β is the absorption rate of the first transmission window 1, and l is the thickness.
Ｅ ＝Ｅ ｅ−βノ １ 。E = E e-βノ 1.
上式で表わされるＥ、は第２の透過窓への入射光１３ｂ
となり、第２の透過窓６の吸収率と厚さが。E expressed in the above formula is the incident light 13b to the second transmission window.
Then, the absorption rate and thickness of the second transmission window 6 are.
第１の透過窓１の吸収率と厚さに等しいため、第２の透
過窓６を透過するエネルギーＥ２はＥ＝Ｅｅ−β１
と表わせる。第１の透過窓１で吸収されたエネルギーは
Ｅｏ−Ｅｌであり、第２の透過窓６で吸収されたエネル
ギーはＥｌ−Ｅ２である。これらの吸収されたエネルギ
ーは熱になシ、各透過窓１，６の温度を上昇させる。第
１の透過窓１の温度上昇をＴ１．第２の透過窓６の温度
上昇をＴ２とすると。Since the absorption rate and thickness of the first transmission window 1 are equal, the energy E2 transmitted through the second transmission window 6 can be expressed as E=Ee-β1. The energy absorbed by the first transmission window 1 is Eo-El, and the energy absorbed by the second transmission window 6 is El-E2. These absorbed energies are converted into heat and increase the temperature of each transmission window 1,6. The temperature rise of the first transmission window 1 is T1. Let T2 be the temperature rise of the second transmission window 6.
比例定数をＫとして、Ｔ１．Ｔ２ は次のように表わせ
る。Letting the proportionality constant be K, T1. T2 can be expressed as follows.
Ｔ１＝ｘ（Ｅｏ−Ｅｌ）
＝＝ ＫＥｏ （１−ｅ−β１）
Ｔ２千Ｋ（Ｅｌ−Ｅ２）
＝＝ ＫＪＣｏ ｅ−β’ （１−ｅ″″βｌ）第１の
透過窓１と第２の透過窓６の温度の差Ｔ１−Ｔ２は
？、−Ｔ２＝ＫＥ０（１−６−βＪ）２と表わすことが
でき、各透過窓１，６間の温度の差Ｔ１−Ｔ２は入射エ
ネルギーＥ０に比ガすることがわかる。したがって、熱
電対の第２の金属線１１ａと１１ｂの間には、第１の透
過窓１の温度と第２の透過窓６の温度の差に応じた信号
が発生するため、検出回路１２によってこの信号を検出
増巾し、変換表示部１３を介して、信号変換したのち表
示することにより、入射レーザ光のエネルギーを測定す
ることができるのである。この時。T1=x(Eo-El) == KEo (1-e-β1) T2,000K(El-E2) == KJCo e-β' (1-e″″βl) First transmission window 1 and second transmission window What is the temperature difference T1-T2 of the transmission window 6? , -T2=KE0(1-6-βJ)2, and it can be seen that the temperature difference T1-T2 between the transmission windows 1 and 6 is proportional to the incident energy E0. Therefore, a signal corresponding to the difference in temperature between the first transmission window 1 and the second transmission window 6 is generated between the second metal wires 11a and 11b of the thermocouple. The energy of the incident laser beam can be measured by detecting and amplifying this signal, converting it into a signal, and then displaying it via the conversion display unit 13. At this time.
たとえば雰囲気温度が変動しても、＠１と第２の透過窓
１と６のそれぞれに同時に影響するため。For example, even if the ambient temperature changes, it affects @1 and the second transmission windows 1 and 6 at the same time.
第１の透過窓１と第２の透過窓６の温度差をとることに
より温度を測定しているので雰囲気温度の影響を除くこ
とができるのである。Since the temperature is measured by taking the temperature difference between the first transmission window 1 and the second transmission window 6, the influence of ambient temperature can be removed.
さらに第１の透過窓１と第２の透過窓６による入射レー
ザ光の吸収量をたとえば２チという僅かな量にすること
ができ、その結果、レーザ光のエネルギーをあまり減衰
させることなく入射レーザ光のエネルギーの測定ができ
るためレーザ光を有効に加工などに使いながら同時に使
用中のレーザ光のエネルギーを測定することが出来るの
で、レーザ加工等の作業精度を上げることができる。Furthermore, the amount of absorption of the incident laser beam by the first transmission window 1 and the second transmission window 6 can be reduced to a small amount of, for example, 2 cm. Since the energy of light can be measured, it is possible to effectively use laser light for processing, etc., and at the same time measure the energy of the laser light being used, thereby increasing the accuracy of work such as laser processing.
なお１本実施例では温度測定用センサとして熱電対を使
用したものについて説明したが、サーミスタを温度測定
用センナとして使用しても本実施例と同様の効果を有す
るものである。In this embodiment, a thermocouple is used as the temperature measurement sensor, but even if a thermistor is used as the temperature measurement sensor, the same effect as in this embodiment can be obtained.
また１本実施例では第１の透過窓と第２の透過窓の吸収
率と厚さを互いに等しくしたが、異なる場合にも、第１
と第２の透過窓間に入射レーザ光エネルギーに比例する
温度差が生じるため１本実施例と同様な効果を有するの
である。Further, in this embodiment, the absorption coefficient and thickness of the first transmission window and the second transmission window are made equal to each other, but even if they are different, the first transmission window
Since a temperature difference proportional to the incident laser light energy is generated between the first and second transmission windows, the same effect as in the first embodiment is obtained.
発明の効果
以上の実施例の説明から明らかなように本発明によれば
、入射レーザ光のエネルギーを周囲の雰囲気温度に影響
されることなく確実に測定することができる。また、透
過窓はレーザ光の一部しか吸収しないため、透過したレ
ーザ光でレーザ加工等の作業を行なうことができる優れ
たレーザ光エネルギー測定装置を得ることができる。Effects of the Invention As is clear from the above description of the embodiments, according to the present invention, the energy of incident laser light can be reliably measured without being affected by the surrounding atmospheric temperature. Furthermore, since the transmission window absorbs only a portion of the laser light, an excellent laser light energy measuring device can be obtained that can perform work such as laser processing using the transmitted laser light.
第１図は本発明の一実施例を示すレーザ光エネルギー測
定装置の斜視図、第２図は、同レーザ光エネルギー測定
装置を示す横断面図、第３図は従来のレーザ光エネルギ
ー測定装置を示す断面図である。
１・・・・・・第１の透過窓、６・・・・・・第２の透
過窓。
１ｏ・・・・・・熱電対の第１の金属線、１１ａ、１１
ｂ・・・・・・熱電対の第２の金属線、１２・・・・・
・検出回路。
１４・・・・・・変換表示部。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名／−
４ｔの透通２
Ｓ−月２の透通窓
ｌＯ−賦を社のｔＪＩの金属線
１１ａ、ｌＩｂ−０９社の！ｌ！Ｊ２の金属線１２−挨
お回路
Ｉ４−変換表示部
第１図Fig. 1 is a perspective view of a laser beam energy measuring device showing an embodiment of the present invention, Fig. 2 is a cross-sectional view showing the same laser beam energy measuring device, and Fig. 3 is a conventional laser beam energy measuring device. FIG. 1...First transmission window, 6...Second transmission window. 1o...First metal wire of thermocouple, 11a, 11
b...Second metal wire of thermocouple, 12...
・Detection circuit. 14... Conversion display section. Name of agent: Patent attorney Toshio Nakao and 1 other person/-
4t transparent window 2 S-month 2 transparent window lO-funding company's tJI metal wire 11a, lIb-09 company's! l! J2 metal wire 12-Gate circuit I4-Conversion display section Fig. 1
Claims (1)
互いに離して同一光軸上に配設し、前記第１と第２の透
過窓のそれぞれに温度測定用センサを設け、さらに前記
各温度測定用センサ間の出力差を検出する検出手段と、
この検出手段により検出された出力差をレーザ光の出力
値に変換する手段とを設けたレーザ光エネルギー測定装
置。First and second transmission windows that partially absorb the incident laser light are arranged on the same optical axis and separated from each other, and a temperature measurement sensor is provided in each of the first and second transmission windows, and further Detection means for detecting an output difference between the temperature measurement sensors;
A laser beam energy measuring device comprising means for converting the output difference detected by the detection means into a laser beam output value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62006610A JPS63173930A (en) | 1987-01-14 | 1987-01-14 | Apparatus for measuring laser beam energy |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62006610A JPS63173930A (en) | 1987-01-14 | 1987-01-14 | Apparatus for measuring laser beam energy |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63173930A true JPS63173930A (en) | 1988-07-18 |
Family
ID=11643124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62006610A Pending JPS63173930A (en) | 1987-01-14 | 1987-01-14 | Apparatus for measuring laser beam energy |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63173930A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2663794A2 (en) * | 1987-08-10 | 1991-12-27 | Strasbourg Sa Electricite | Device for analysis in continuous mode and in pulsed mode of the energy distribution within a power laser beam and of the alignment of this beam |
| US7550694B2 (en) * | 2004-12-24 | 2009-06-23 | Advanced Lcd Technologies Development Center Co., Ltd. | Laser anneal apparatus |
| CN102243099A (en) * | 2011-04-11 | 2011-11-16 | 天津滨海华医光电技术有限公司 | Laser spot power density testing device |
| CN102486407A (en) * | 2010-12-27 | 2012-06-06 | 北京国科世纪激光技术有限公司 | Laser energy meter and automatic dormancy and awakening method thereof |
-
1987
- 1987-01-14 JP JP62006610A patent/JPS63173930A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2663794A2 (en) * | 1987-08-10 | 1991-12-27 | Strasbourg Sa Electricite | Device for analysis in continuous mode and in pulsed mode of the energy distribution within a power laser beam and of the alignment of this beam |
| US7550694B2 (en) * | 2004-12-24 | 2009-06-23 | Advanced Lcd Technologies Development Center Co., Ltd. | Laser anneal apparatus |
| CN102486407A (en) * | 2010-12-27 | 2012-06-06 | 北京国科世纪激光技术有限公司 | Laser energy meter and automatic dormancy and awakening method thereof |
| CN102243099A (en) * | 2011-04-11 | 2011-11-16 | 天津滨海华医光电技术有限公司 | Laser spot power density testing device |
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