JPS6383267A - Heating medium circulation type sealing roll - Google Patents

Abstract

PURPOSE:To prevent the sealing effect of a sealing roll from being reduced with thermal deformation thereof by allowing a heating medium to flow in the vicinity of the surface of the sealing roll in a vacuum deposition line. CONSTITUTION:A vapor deposited Zn layer is formed by introducing a steel sheet 301 into a vacuum vessel 303 in a vacuum deposition line and vacuum- depositing metal such as Zn on the surface of the steel sheet 301 in a vapor deposition chamber 305. In this case, the steel sheet 301 existing in the outside air is passed through plural sets of sealing rolls 302 and infiltrated into the vacuum vessel 303, and after vacuum deposition, it is again taken out to the atmosphere through the plural sets of sealing rolls. Since the sealing rolls are raised in temp. by the contact with the steel sheet 301 and temp. distribution is caused in the circumferential directions of the sealing rolls, the parts high in temp. are made to projecting forms, clearances are formed between these and the steel sheet, and sealing failure is generated. In this case, the sealing roll is formed by setting a sleeve 201 on a core part 202 having grooves 203 as a passage for a heating medium such as water and oil and thereby deforma tion is not caused because the sealing roll is cooled with the heating medium and therefore sealing capacity for air is prevented from being reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a seal roll for a vacuum deposition line.

[Conventional technology]

FIG. 3 shows an outline of a vacuum evaporation apparatus that continuously performs vacuum evaporation on the surface of a steel plate. In Fig. 5, 301 is a steel plate, 30
2 is a seal roll, 303 is a vacuum container, 504 is a winding roll, 305 is a deposition chamber, and 306 is a vacuum pump.

The high-temperature steel plate 501 is led to a vapor deposition chamber 305, and is vapor-deposited on a winding roll 504 using steam from a vapor deposition source (not shown) to become a product.

Here, the temperature of the steel plate 301 is determined by the vapor deposition conditions, and in the case of vapor depositing ZN, it is usually necessary to set the temperature to 250 to 250°C. Further, the degree of vacuum in the vapor deposition chamber 505 is determined by the evaporation conditions of the metal to be vaporized, and in the case of ZN, it is 10''! 1
It is necessary to set it to around °orr. For this reason, the deposition chamber 305 is kept in a vacuum by using several stages of seal rolls 302.

A general F@ structure near the seal roll 502 is shown in FIG.

In FIG. 4, 401 is a steel plate, 402 is a seal roll, 403 is a vacuum container, and 406 is a seal bar.

Seal Roll A 02 C 2) Nororute Steel plate 401 is sandwiched between these rolls, and these rolls rotate at line speed. By maintaining a small gap between the sealer 406 and the seal roll 402, the amount of gas leaking into the next room is reduced.

[Problem that the invention seeks to solve]

The temperature of the seal roll 402 increases due to contact with the steel plate 401. At this time, if a temperature distribution occurs in the circumferential direction of the seal roll 4010, the seal roll 401 is deformed due to the difference in thermal expansion, as shown in FIG. In other words, the high-temperature portions protrude.

Once this deformation occurs, only the protruding portion of the seal roll 402 comes into contact with the steel plate 401 when it rotates, and the temperature of this portion increases further, increasing the deformation.

Conventionally, there has been a problem that the vacuum seal becomes incomplete due to the deformation of the seal roll as described above.

The present invention aims to provide a seal roll that can eliminate the problems of the conventional seal rolls described above.

[Failure to solve the problem]

The present invention is a heat medium circulation type seal roll for a vacuum deposition line, characterized in that a flow path for heat medium circulation is provided near the surface layer of the seal roll to circulate the heat medium.

[Effect]

By flowing the heat medium near the surface of the seal roll, the central portion of the seal roll can be forcibly maintained at the temperature of the heat medium.

〔Example〕

Hereinafter, an example in which the present invention is applied to a vacuum deposition line for depositing zinc onto a steel plate will be explained with reference to FIG. 1 as one embodiment of the present invention.

FIG. 1 is a diagram showing a cross-sectional shape of a seal roll according to an embodiment of the present invention, and 101 in the figure is a heat medium flow path. Here, an example of each dimension is as follows.

δ=5m, ! =6m, W=3w, P=6m, R
= 205g At this time, if the temperature of the heating medium is set to 150℃ and the heat transfer coefficient of the heating medium is set to 2 a so kca1/-・h・℃, the circumferential temperature unevenness of the seal roll can be suppressed to within 3℃ at most. It will be done.

The heat medium may be water, oil, or other types.

An example of manufacturing the heat medium flow path 101 shown in FIG. 1 is shown in FIG.

A sleeve 20 is attached to a core 202 with grooves for heat medium circulation.
1 into the core 202 from one end.

Furthermore, the sleeve 201 and the core 202 are fixed with the fixing ring 204.
to be fixed. Note that the sleeve 201 and the core 202, the sleeve 201 and the fixing ring 204, and the core 202 and the fixing ring 204 are each fixed by welding.

〔Effect of the invention〕

By forcibly maintaining the seal roll temperature at the heating medium temperature, thermal deformation of the seal roll can be reduced.

[Brief explanation of the drawing]

Fig. 1 is an explanatory diagram of an embodiment of the present invention, Fig. 2 is an explanatory diagram of manufacturing a seal roll according to an embodiment of the present invention; -A sectional view, Figure 3 is a schematic diagram of a general vacuum deposition line, Figure 4 is an explanatory diagram of the seal structure in the vacuum deposition line in Figure 5, and Figure 5 explains the drawbacks of the conventional seal roll. This is a useless diagram. Figure 1 Figure 2-A

Claims (1)

[Claims] A heat medium circulation type seal roll for a vacuum deposition line, characterized in that a flow path for heat medium circulation is provided near the surface layer of the seal roll to circulate the heat medium.