JPS6382935U - - Google Patents
Info
- Publication number
- JPS6382935U JPS6382935U JP17898186U JP17898186U JPS6382935U JP S6382935 U JPS6382935 U JP S6382935U JP 17898186 U JP17898186 U JP 17898186U JP 17898186 U JP17898186 U JP 17898186U JP S6382935 U JPS6382935 U JP S6382935U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- contact
- atmosphere
- holding
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986178981U JPH0749789Y2 (ja) | 1986-11-19 | 1986-11-19 | 電子ビ−ム露光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986178981U JPH0749789Y2 (ja) | 1986-11-19 | 1986-11-19 | 電子ビ−ム露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6382935U true JPS6382935U (enExample) | 1988-05-31 |
| JPH0749789Y2 JPH0749789Y2 (ja) | 1995-11-13 |
Family
ID=31121623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986178981U Expired - Lifetime JPH0749789Y2 (ja) | 1986-11-19 | 1986-11-19 | 電子ビ−ム露光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0749789Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007266361A (ja) * | 2006-03-29 | 2007-10-11 | Nuflare Technology Inc | 基板のアース機構及び荷電粒子ビーム描画装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60167245A (ja) * | 1984-02-10 | 1985-08-30 | Hitachi Ltd | 試料保持装置 |
-
1986
- 1986-11-19 JP JP1986178981U patent/JPH0749789Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60167245A (ja) * | 1984-02-10 | 1985-08-30 | Hitachi Ltd | 試料保持装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007266361A (ja) * | 2006-03-29 | 2007-10-11 | Nuflare Technology Inc | 基板のアース機構及び荷電粒子ビーム描画装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0749789Y2 (ja) | 1995-11-13 |