JPS6382933U - - Google Patents

Info

Publication number

JPS6382933U

JPS6382933U JP17661286U JP17661286U JPS6382933U JP S6382933 U JPS6382933 U JP S6382933U JP 17661286 U JP17661286 U JP 17661286U JP 17661286 U JP17661286 U JP 17661286U JP S6382933 U JPS6382933 U JP S6382933U

Authority

JP

Japan

Prior art keywords

optical system

substrate

exposure apparatus

projection exposure

plate

Prior art date

1986-11-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000003287 optical effect Effects 0.000 claims description 5
• 239000000758 substrate Substances 0.000 claims 3
• 238000005286 illumination Methods 0.000 claims 1
• 238000003384 imaging method Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
• 229910052753 mercury Inorganic materials 0.000 description 1