JPS6381868U - - Google Patents
Info
- Publication number
- JPS6381868U JPS6381868U JP17569886U JP17569886U JPS6381868U JP S6381868 U JPS6381868 U JP S6381868U JP 17569886 U JP17569886 U JP 17569886U JP 17569886 U JP17569886 U JP 17569886U JP S6381868 U JPS6381868 U JP S6381868U
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- substrate
- molecular beam
- irradiation means
- beam source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 230000005284 excitation Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図は本考案の一実施例を示す概略断面図、
第２図はシヤツタ機構を示す概略断面図、第３図
は同実施例の動作を示す波形図である。 ２……チヤンバ、６……基板、８……基板加熱
ホルダー、１０，１２……蒸発源、２０……薄膜
、２２，２４……蒸発源用シヤツタ、２８……光
励起用光源、３０……光源用シヤツタ。
第２図はシヤツタ機構を示す概略断面図、第３図
は同実施例の動作を示す波形図である。 ２……チヤンバ、６……基板、８……基板加熱
ホルダー、１０，１２……蒸発源、２０……薄膜
、２２，２４……蒸発源用シヤツタ、２８……光
励起用光源、３０……光源用シヤツタ。
Claims (1)
- 薄膜を成長させる基板と分子線源の間にシヤツ
タを設け、前記基板を照射する光励起用照射手段
を設け、この照射手段と前記基板との間にもシヤ
ツタを設け、前記分子線源用シヤツタと前記照射
手段用シヤツタを交互に開閉動作させる分子線エ
ピタキシヤル成長装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17569886U JPH0437908Y2 (ja) | 1986-11-14 | 1986-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17569886U JPH0437908Y2 (ja) | 1986-11-14 | 1986-11-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6381868U true JPS6381868U (ja) | 1988-05-30 |
| JPH0437908Y2 JPH0437908Y2 (ja) | 1992-09-04 |
Family
ID=31115265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17569886U Expired JPH0437908Y2 (ja) | 1986-11-14 | 1986-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437908Y2 (ja) |
-
1986
- 1986-11-14 JP JP17569886U patent/JPH0437908Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0437908Y2 (ja) | 1992-09-04 |