JPS6380546U - - Google Patents
Info
- Publication number
- JPS6380546U JPS6380546U JP1986175401U JP17540186U JPS6380546U JP S6380546 U JPS6380546 U JP S6380546U JP 1986175401 U JP1986175401 U JP 1986175401U JP 17540186 U JP17540186 U JP 17540186U JP S6380546 U JPS6380546 U JP S6380546U
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- alignment
- boundary line
- alignment mark
- figures
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 1
- 238000000206 photolithography Methods 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986175401U JPH0438355Y2 (en, 2012) | 1986-11-17 | 1986-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986175401U JPH0438355Y2 (en, 2012) | 1986-11-17 | 1986-11-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6380546U true JPS6380546U (en, 2012) | 1988-05-27 |
| JPH0438355Y2 JPH0438355Y2 (en, 2012) | 1992-09-08 |
Family
ID=31114693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986175401U Expired JPH0438355Y2 (en, 2012) | 1986-11-17 | 1986-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0438355Y2 (en, 2012) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5116878A (en) * | 1974-08-01 | 1976-02-10 | Fujitsu Ltd | Hoto masukuno seizohoho |
-
1986
- 1986-11-17 JP JP1986175401U patent/JPH0438355Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5116878A (en) * | 1974-08-01 | 1976-02-10 | Fujitsu Ltd | Hoto masukuno seizohoho |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0438355Y2 (en, 2012) | 1992-09-08 |