JPS6380088U - - Google Patents
Info
- Publication number
- JPS6380088U JPS6380088U JP1986174889U JP17488986U JPS6380088U JP S6380088 U JPS6380088 U JP S6380088U JP 1986174889 U JP1986174889 U JP 1986174889U JP 17488986 U JP17488986 U JP 17488986U JP S6380088 U JPS6380088 U JP S6380088U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- laser
- aperture mechanism
- repair
- shifter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本考案の一実施例に係るレーザリペア
用アパーチヤ機構の概略構成図、第２図は従来の
レーザリペア用アパーチヤ機構の構成を示す図で
ある。
１：アパーチヤ、２，３：ビームシフタ、１０
，１１：駆動装置、１０１，１０２：レーザビー
ム、１１０，１２０：光軸。
FIG. 1 is a schematic configuration diagram of an aperture mechanism for laser repair according to an embodiment of the present invention, and FIG. 2 is a diagram showing the configuration of a conventional aperture mechanism for laser repair. 1: Aperture, 2, 3: Beam shifter, 10
, 11: Drive device, 101, 102: Laser beam, 110, 120: Optical axis.
Claims (1)
ア用アパーチヤ機構において、上記レーザビーム
の進路上に駆動手段によつて傾きを自在に変える
ことのできる透明基板よりなるビームシフタを設
け、上記ビームシフタを通過させることにより上
記レーザビームを加工光軸に平行に移動させるこ
とを特徴とするレーザリペア用アパーチヤ機構。 In the aperture mechanism for laser repair that limits the irradiation area of the laser beam, a beam shifter made of a transparent substrate whose inclination can be freely changed by a driving means is provided on the path of the laser beam, and the laser beam passes through the beam shifter. An aperture mechanism for laser repair, characterized in that the laser beam is moved parallel to a processing optical axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986174889U JPS6380088U (en) | 1986-11-14 | 1986-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986174889U JPS6380088U (en) | 1986-11-14 | 1986-11-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6380088U true JPS6380088U (en) | 1988-05-26 |
Family
ID=31113693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986174889U Pending JPS6380088U (en) | 1986-11-14 | 1986-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6380088U (en) |
-
1986
- 1986-11-14 JP JP1986174889U patent/JPS6380088U/ja active Pending
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