JPS6379665U - - Google Patents

Info

Publication number
JPS6379665U
JPS6379665U JP17507286U JP17507286U JPS6379665U JP S6379665 U JPS6379665 U JP S6379665U JP 17507286 U JP17507286 U JP 17507286U JP 17507286 U JP17507286 U JP 17507286U JP S6379665 U JPS6379665 U JP S6379665U
Authority
JP
Japan
Prior art keywords
laser
gas
tube
outlet
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17507286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17507286U priority Critical patent/JPS6379665U/ja
Publication of JPS6379665U publication Critical patent/JPS6379665U/ja
Pending legal-status Critical Current

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  • Lasers (AREA)
JP17507286U 1986-11-13 1986-11-13 Pending JPS6379665U (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17507286U JPS6379665U (en:Method) 1986-11-13 1986-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17507286U JPS6379665U (en:Method) 1986-11-13 1986-11-13

Publications (1)

Publication Number Publication Date
JPS6379665U true JPS6379665U (en:Method) 1988-05-26

Family

ID=31114051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17507286U Pending JPS6379665U (en:Method) 1986-11-13 1986-11-13

Country Status (1)

Country Link
JP (1) JPS6379665U (en:Method)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6274430A (ja) * 1985-09-28 1987-04-06 Central Glass Co Ltd 希ガスハライドエキシマ−レ−ザ−ガスの精製法
JPS62279824A (ja) * 1986-05-29 1987-12-04 Central Glass Co Ltd 希ガスハライドエキシマ−レ−ザ−ガスの精製法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6274430A (ja) * 1985-09-28 1987-04-06 Central Glass Co Ltd 希ガスハライドエキシマ−レ−ザ−ガスの精製法
JPS62279824A (ja) * 1986-05-29 1987-12-04 Central Glass Co Ltd 希ガスハライドエキシマ−レ−ザ−ガスの精製法

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