JPS637915A - Mold for transfer molding - Google Patents

Mold for transfer molding

Info

Publication number
JPS637915A
JPS637915A JP15227086A JP15227086A JPS637915A JP S637915 A JPS637915 A JP S637915A JP 15227086 A JP15227086 A JP 15227086A JP 15227086 A JP15227086 A JP 15227086A JP S637915 A JPS637915 A JP S637915A
Authority
JP
Japan
Prior art keywords
mold
chase
temperature
chases
heated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15227086A
Other languages
Japanese (ja)
Other versions
JPH0747292B2 (en
Inventor
Mitsuhiro Obara
小原 光博
Hisanori Tanabe
田辺 久則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP61152270A priority Critical patent/JPH0747292B2/en
Publication of JPS637915A publication Critical patent/JPS637915A/en
Publication of JPH0747292B2 publication Critical patent/JPH0747292B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/72Heating or cooling
    • B29C45/73Heating or cooling of the mould

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

PURPOSE:To prevent generation of burrs on a molded product along with performance of high-accuracy temperature control, by a method wherein a chase is fitted to a mold plate by keeping a heat insulation state on and a heating device is provided on the chase. CONSTITUTION:When each sheathed heater 36 is heated by electrifying the same, chases 14, 25 each are heated. In this instance, as spaces 40, 41 are provided among the sheathed heater 36 and mold plates 13, 24, transfer of heat to the mold plates 13, 24 from the chase sides 14, 25 is controlled to the upmost and faces forming recessions 15, 26 of the chases 14, 25 each are heated up to a predetermined mold temperature rapidly and uniformly. In the case where temperature dispersion is generated between the chases each further, temperature control of the sheathed heater 36 is performed every chases 14, 25 and the predetermined mold temperature is kept on. With this construction, as there is no dispersion in thermal displacement generation of burrs on a product can be prevented.

Description

【発明の詳細な説明】 「産業上の利用分野」 本発明は、例えば、IC素子、トランジスタ等の半導体
製品のパッケージを成形するためのトランスファー成形
用金型(:関する、 「従来の技術」 一般に、この種のトランスファー成形用金型は、使用す
る樹脂(熱硬化性樹脂〕の特注(二よシ、金型は160
〜185℃程度に71[+熱しておく必要がある。その
ため、金を内に加熱装置(ヒーター)を組込む構成とさ
れている、 「発明が解決しようとする問題点」 ところで、半導体製品の生産工#A−二あっては、昼夜
兼行で製造する場会が多(、その丸め、上記金型に連続
稼動でれるのが常である6従って、金型の加熱状態を維
持する必要があるため、その消費電力貴が嵩むという問
題かあ)、省電力型の金型の開発が望まれている6 また、通常は、第3図C:示すように、型板1内1:設
けられたヒータ一孔2に、カートリッジヒーターを挿入
し、このカー) +7ツジヒーターによる熱伝導加熱で
チェイス3を加温するため、金型のセットアツプの際に
、チェイス3が所定ti&に安定する1でにンユ1.ヒ
;己カートリッジヒーターI:よる加熱を開始してから
、約2〜4時間が必要とな)、時間がかかるという問題
がある。
DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a transfer molding mold for molding packages of semiconductor products such as IC elements and transistors. , this type of transfer molding mold is custom-made for the resin (thermosetting resin) used.
It is necessary to heat it to about 185℃. For this reason, the structure is such that a heating device (heater) is built into the metal. The problem is that the rounding process and the above-mentioned molds are usually operated continuously6, so it is necessary to maintain the heating state of the molds, which increases the power consumption. The development of electric-powered molds is desired.6 In addition, normally, as shown in Figure 3C, a cartridge heater is inserted into the heater hole 2 provided in the mold plate 1, and the cartridge heater is ) Since the chase 3 is heated by conduction heating by the +7 Tsuji heater, when setting up the mold, the chase 3 is stabilized at the predetermined ti&. Cartridge heater I: It takes about 2 to 4 hours from the start of heating.) There is a problem in that it takes a long time.

さら1:、金型昇温後に各チェイス3間の][;バラツ
キ(不均一)が生じfc鳩会ぽ二は、これを修正するた
めに、当該チェイス3の近傍に設置された型板1円のヒ
ーターのボリュームを調整するが、上述したよう6二、
熱伝導による加熱のため、調整作業3二時間がかかる上
に、高精度の温度制御が不可能で、作僅者の勘にたよっ
た調埜となる。寸た、これを解決しようとして、各ヒー
タ一孔2の近傍に熱電対孔4を設け、この熱電対孔4内
こ熱電対を挿入することによって、各ヒーターの温度制
御を行なうものも知られているが、一枚の型板1内I:
数本のヒーターが挿入されているため、各ヒーターの近
傍の温度制御は可能であっても、型板1の各部に点在し
ている各チェイス3の温度の均一化を内るのは困難であ
る。そして、このようC:、各チェイス3の温度の均一
化を図ることができないと、牛エイス3間の締付力にバ
ラツキが生じ、中ャビテイ内から樹脂が洩れて、成形品
にパリが発生下るという問題が生じる。
Further 1: After the temperature of the mold was raised, variations (non-uniformity) occurred between the chases 3, and in order to correct this, fc Hatokai Poji installed the mold plate 1 near the chase 3. Adjust the volume of the circular heater, but as mentioned above, 62,
Because heating is conducted through thermal conduction, the adjustment process takes 32 hours, and it is impossible to control the temperature with high precision, leaving the grower dependent on his or her intuition. In an attempt to solve this problem, it is known that a thermocouple hole 4 is provided near each heater hole 2, and the temperature of each heater is controlled by inserting the thermocouple into the thermocouple hole 4. However, within one template 1:
Since several heaters are inserted, even if it is possible to control the temperature near each heater, it is difficult to equalize the temperature of each chaser 3 that is scattered in various parts of the template 1. It is. C: If it is not possible to equalize the temperature of each chaser 3, there will be variations in the tightening force between the chasers 3, resin will leak from inside the cavity, and cracks will occur in the molded product. The problem of going down arises.

本発明は、上記事情に鑑みてなされたもので、その目的
とするところは、加熱に要する消費電力f#を低減する
ことができて、チェイスを効率的I:加熱することがで
きる上に、チェイスの昇温及び温度y4整を迅速Sこ行
え、高精度の温度制御を行なうことができろと共1m、
成形品にパリが発生することを防止できて、良好なり1
品を成形することができるトランスファー!Iz形用今
型を提供することにある。
The present invention has been made in view of the above circumstances, and its purpose is to be able to reduce the power consumption f# required for heating, to heat the chase efficiently, and to It is possible to quickly raise the temperature of the chase and adjust the temperature, and to perform high-precision temperature control.
It is possible to prevent the formation of flakes on the molded product, which is good.
Transfer that can mold products! The purpose of the present invention is to provide a new mold for the Iz type.

「間′jA点71−解決するためのf−役、!上記目的
を達成するために、本発明は、型板に、断熱状態を保っ
てチェイスを取付け、かつ核手工イスに、カロ熱手段を
投げたものである。
``Interval'jA point 71 - f- role for solving!'' In order to achieve the above object, the present invention attaches a chase to the template while keeping it insulated, and attaches a caloric heating means to the nuclear handcraft chair. This is what I threw.

「作用j 本発明のトうンスファー成形用合工にあっては、7Jr
l熱手段によってチェイスを力ロ熟すると井1:、チェ
イスと型板との間を断熱状態に保って、至板IQ11へ
の熱の洩れを抑制する。
"Function j" In the synthetic material for forming tone fur of the present invention, 7 Jr.
When the chase is heated by heat means, heat insulation is maintained between the chase and the template to suppress leakage of heat to the final plate IQ11.

「実施例」 以下、第1図とm2rflUに恭づいて、本発明の一警
范例を説明する。
"Example" Hereinafter, an example of the present invention will be described with reference to FIG. 1 and m2rflU.

第1因に金型の主要部を示す断面図、算2図はf:型の
概要を示す股略断訂図である。これらの図Cユおいて、
符号10は、上取付役であシ、この下取付板10の下面
には、上スペーサ−11及び上訴熱材12を介して、上
型板13が固定されている。そして、この、上型板13
の下面C:は、上チェイス14が固定されており、この
上チェイス14の下面(:は、凹QC上キャと)15が
形成されている、 また、上記下取付板10と上型板13との間4:は、上
突出板16と」−突出板!11え17とが上突出ピン1
8のツバ部を挾持した状態で上下t:s勧自在C:設け
られている。そして、これらの上突出板16と上突出板
押え17とによって、上記上突出ピン18が、上型板1
3及び上チェイス14を貫通して、上記上キャビ15内
に出没するようになっている。さらに、この上突出ビン
18を型開時に上キャビ15173に突出させるたぬの
スプリング19が上突出板16の上面C二装置されてい
る。
The first factor is a sectional view showing the main parts of the mold, and Figure 2 is a cross-sectional view showing an outline of the mold. In these diagrams,
Reference numeral 10 denotes an upper mounting member, and an upper mold plate 13 is fixed to the lower surface of the lower mounting plate 10 via an upper spacer 11 and a heating material 12. And this upper template 13
The lower surface C: is fixed to the upper chaser 14, and the lower surface (: is the concave QC upper cap) 15 of the upper chaser 14 is formed. Also, the lower mounting plate 10 and the upper mold plate 13 Between 4: is the upper protruding plate 16 and the - protruding plate! 11 and 17 are upper protruding pins 1
C: is provided so that it can be moved up and down t:s while holding the collar part of 8. These upper protruding plates 16 and upper protruding plate retainers 17 allow the upper protruding pins 18 to be
3 and the upper chaser 14, and enters and retracts into the upper cabinet 15. Further, a tongue spring 19 is provided on the upper surface C2 of the upper protrusion plate 16 to cause the upper protrusion bottle 18 to protrude into the upper cavity 15173 when the mold is opened.

上記下取付板10の下方には、該下取付板10(二対向
した状態で下取付板20が設けられており、両数付板1
0.2n間は、型締時C接近し、型開時に離間するよう
になっている。そして、この下取付板20の上面茗二ハ
、下スペーサー21、サボ−)22、下′PR熱材23
を介して、下型板24が配設されている。また、下型板
24の上面には、下チェイス25が固定されておシ、こ
の下チェイス25の上面(:は、凹部(下キャビ)26
及びリードフレーム27挿入用の凹所28がそれぞれ形
成されていると共に、鞍下キャビ26に連通するゲート
29及r)ニー7ンナー30がそれぞれJに成されてい
る。そして、上記上下キャビ15.26によって半導体
製品のパッケージ用のキャビティが構成されている。
Below the lower mounting plate 10, a lower mounting plate 20 is provided with two facing each other.
For a distance of 0.2n, C approaches when the mold is closed, and separates when the mold opens. Then, the upper surface of the lower mounting plate 20, the lower spacer 21, the sabot) 22, the lower PR heat material 23
A lower mold plate 24 is disposed via the lower mold plate 24 . In addition, a lower chaser 25 is fixed to the upper surface of the lower template plate 24.
and a recess 28 for inserting a lead frame 27 are formed, and a gate 29 and a knee 7 inner 30 communicating with the under-saddle cavity 26 are formed in J, respectively. The upper and lower cavities 15 and 26 constitute a cavity for a package of a semiconductor product.

ざらに、上記下取付板20と下型板24との間には、上
突出板31と上突出板押え32とが、上突出ビン33の
ツバ部を挾持した状態で、上記サポート22に沿って上
下に移動自在に設けられている。そして、これらの上突
出板31と上突出板押え32と(二よって、上突出ピン
33が、下型板24及び下チェイス25を貫通して、上
記下キャビ26内に出没でろように>)っている、また
、上突出板31と下型板24との間じは、下突出板31
を下方に付勢−rるスプリング34が装着てれており、
上突出板31の下面には、ストッパー35が取付けられ
ている。
Roughly speaking, between the lower mounting plate 20 and the lower mold plate 24, an upper protruding plate 31 and an upper protruding plate retainer 32 are placed along the support 22 while holding the collar of the upper protruding bottle 33. It is provided so that it can be moved up and down. Then, these upper protruding plate 31 and upper protruding plate retainer 32 (so that the upper protruding pin 33 penetrates the lower mold plate 24 and lower chase 25 and comes out and retracts into the lower cavity 26) The gap between the upper protruding plate 31 and the lower mold plate 24 is
A spring 34 is installed which urges the
A stopper 35 is attached to the lower surface of the upper protruding plate 31.

ざらに樗た、上記上下チェイス14.25の、上記上下
型板13.2411の面において、上記上下キャビ15
.26に対応する位置には、シースヒーター36装τ用
の凹所37.38がそれぞれ形成上れており、各凹所3
7.38には、シースヒーター36がそれぞれビス39
により取付けられている。そして、該シースヒーター3
6と上下型板13.24との間I:は、空隙40.41
が形成されている。なお、この空隙40.41に保温材
を嵌め込んで熱的な5角縁を図ってもよい、また、上記
シースヒーター36を装着した部分以外の上下チェイス
14.25の上面及rN下面には、スリット状あるいe
10−レット状の溝部14a、25aが老成てれておシ
、これにより、各型板13゜24(!!Iへの熱の移動
を防ぐようIニなっている。そして、上記シースヒータ
ー36は、従来同様、プレスコンセントから給@ i 
し、かつボリューム調整で温度制御するか、あるいに、
各チェイス14゜25に熱電対を設置して、フィードバ
ックf!il!御にて温度管理するかのいずれかが採用
される。ざらに、称号42框チェイス14.25と型板
13゜24との間を固定する押えボルトである。
In the surface of the upper and lower mold plates 13.2411 of the upper and lower chases 14.25, the upper and lower cavities 15
.. At the positions corresponding to 26, recesses 37 and 38 for sheath heaters 36 and τ are respectively formed, and each recess 3
7.38, the sheath heater 36 is attached to each screw 39.
It is installed by And the sheath heater 3
6 and the upper and lower mold plates 13.24 I: is a gap 40.41
is formed. Note that a thermal pentagonal edge may be created by fitting a heat insulating material into this gap 40.41.Also, the upper surface and lower surface of the upper and lower chases 14.25 other than the part where the sheath heater 36 is attached are , slit-like or e
The grooves 14a and 25a in the 10-let shape have aged, and as a result, each mold plate 13°24 (!! is supplied from the press outlet as before @ i
and control the temperature by adjusting the volume, or
Install a thermocouple at each chase 14°25 and feedback f! Il! Either temperature control or manual temperature control is adopted. Roughly speaking, it is a presser bolt that fixes between the title 42 stile chase 14.25 and the template 13°24.

上記のようI:構成され九トランス7丁−成形用金型に
おいて、各シースヒーター36に通電して発熱させると
、その熱I:よシ、各チェイス14゜25が71u熱さ
れる。この場せ、シースヒーター36と型板13.24
との間l二は、空隙40.41が設けられており、エア
ー断熱されていると共に、チェイス14.25の、型板
13.24との接触面は、スリット状、あるいはローレ
ット状の?5ffE14A、25aが彫収されているか
ら、チェイス14s25側から型板13.24への熱の
移動に極力抑制され、各チェイス14.250シースヒ
ーター36によって効率良(加熱される。また、面状の
シースヒーター36をチェイス14.25の、型板13
.24側の面C:配置したから、千エイス14.25内
を熱が満遍なく伝わυ、各チェイス14.25の、凹部
15.26を形成している面が、迅速Cかつ均一に所定
の金型温度まで加熱源れろ。
When each sheath heater 36 is energized to generate heat in the nine-transformer seven-forming mold constructed as described above, each chaser 14°25 is heated by 71 u. At this point, sheath heater 36 and template 13.24
A gap 40.41 is provided between the chaser 14.25 and the template 13.24 for air insulation, and the contact surface of the chaser 14.25 with the mold plate 13.24 is slit-shaped or knurled. Since the 5ffE14A and 25a are carved, the transfer of heat from the chase 14s25 side to the template 13.24 is suppressed as much as possible, and it is efficiently (heated) by each chase 14.250 sheath heater 36. Sheath heater 36 of Chase 14.25, template 13
.. 24 side surface C: Because of the arrangement, heat is evenly transmitted inside the thousand eights 14.25 υ, and the surface forming the recess 15.26 of each chaser 14.25 quickly and uniformly heats the specified gold. Bring the heat source up to mold temperature.

さらに、各型板13.24の各部に配置された各チェイ
ス14.251’Jに温度のバラツ=Pが生シた場合に
は、各チェイス14 、25毎4−、シースヒーター3
6の温度コントロールを行ない、所定の4?:型温度を
維持する、             イなお、上配実
弛例においては、加熱手段としてシースヒーター36を
用いて説明したが、チェイス内にスペース的な余裕があ
る場合には、チェイス内に、ヒータ一孔を設けてカート
1ノツジヒーターを挿入した構成でもよい。
Furthermore, if the temperature variation = P occurs in each chase 14.251'J arranged in each part of each template 13.24, each chase 14, 25 4-, sheath heater 3
Perform the temperature control of 6 and set the temperature to the specified 4? :Maintain the mold temperature. b. In the case of upper mold relaxation, the explanation was given using the sheath heater 36 as a heating means, but if there is sufficient space in the chase, it is possible to install a heater in the chase. A configuration in which a hole is provided and a cart one-knot heater is inserted may also be used.

「発明の効果」 以上説明したように、本発明は、型板に、断熱状態を保
ってチェイスを取付け、かつ該チェイスin、加熱手段
を設けたものであるから、チェイスのみを加熱すること
によシ、消費電力量を大幅に(約172に)低減で鳶、
かつ短時間で昇温できる。また、各チェイス毎cI51
別に温度制御できるから1各チ工イス間の湿度を容易l
二均−C:できる。
"Effects of the Invention" As explained above, in the present invention, the chaser is attached to the template while maintaining the heat insulation state, and the chaser is provided with a heating means, so that only the chaser can be heated. By significantly reducing power consumption (to about 172),
And the temperature can be raised in a short time. Also, cI51 per each chase
Since the temperature can be controlled separately, it is easy to adjust the humidity between each chair.
Double-C: Possible.

また、チェイス以外の踊熱が々(なるため、製品面プロ
ツクCチェイス)以外の主型の熱変位g:よる寸法変化
がな(、しかも、各チェイス間の温度が容易に均一にで
六ろため、各チェイスの熱変位のバラツキがないから、
製品にパリが発生τることを防止できるという優れた効
果を有する〜
In addition, there is no dimensional change due to thermal displacement (g) of the main mold other than the product surface proc. Therefore, there is no variation in thermal displacement of each chase.
It has an excellent effect of preventing dust from forming on the product.

【図面の簡単な説明】[Brief explanation of the drawing]

第1陶と5!2図は本発明の一実権例を示すもので、第
1図は金型の主要部を示す断面図、42図は一部を省略
した概略断面図、第3図は従来のトランスファー代形用
金型の説明図である、13・・・・・・上型板 14・・・・・・上チェイス 15・・・・・・凹部(上キャビ〕 24・・・・・・下型板 25・・・・・・下チェイス 26・・・・・・凹部(下キャビ) 36・・・・・・シースヒーター 40・・・・・・空j 41・・・・・・空ε、杢 14a・・・・・・溝部 25 a・・・・・・′−d部、 出J八三菱金F4株式会社 一−
Figures 1 and 5 and 2 show one practical example of the present invention. Figure 1 is a cross-sectional view showing the main parts of the mold, Figure 42 is a schematic cross-sectional view with some parts omitted, and Figure 3 is a cross-sectional view showing the main part of the mold. It is an explanatory diagram of a conventional transfer substitute mold, 13... upper mold plate 14... upper chase 15... recess (upper cavity) 24... ...Lower mold plate 25...Lower chase 26...Recess (lower cabinet) 36...Sheath heater 40...Empty j 41...・Empty ε, heather 14a...Groove 25a...'-d part, Out J8 Mitsubishi Kin F4 Co., Ltd. 1-

Claims (1)

【特許請求の範囲】[Claims] 合わせ面にキヤビテイが形成されたチエイスを型板に取
付けてなるトランスファー成形用金型において、上記チ
エイスと型板とを熱的に絶縁すると共に、上記チエイス
に、該チエイスを加熱するための加熱手段を設けたこと
を特徴とするトランスファー成形用金型。
In a transfer molding mold in which a cheese having a cavity formed on a mating surface is attached to a mold plate, the cheese and the mold plate are thermally insulated, and the cheese is provided with heating means for heating the cheese. A mold for transfer molding characterized by being provided with.
JP61152270A 1986-06-28 1986-06-28 Transfer mold Expired - Lifetime JPH0747292B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61152270A JPH0747292B2 (en) 1986-06-28 1986-06-28 Transfer mold

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61152270A JPH0747292B2 (en) 1986-06-28 1986-06-28 Transfer mold

Publications (2)

Publication Number Publication Date
JPS637915A true JPS637915A (en) 1988-01-13
JPH0747292B2 JPH0747292B2 (en) 1995-05-24

Family

ID=15536824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61152270A Expired - Lifetime JPH0747292B2 (en) 1986-06-28 1986-06-28 Transfer mold

Country Status (1)

Country Link
JP (1) JPH0747292B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11390188B2 (en) 2018-01-29 2022-07-19 Ts Tech Co., Ltd. Latch device and vehicle seat

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5938017A (en) * 1982-08-25 1984-03-01 Mitsubishi Electric Corp Molding machine for semiconductor device
JPS59110126A (en) * 1982-12-16 1984-06-26 Toshiba Corp Mold package forming apparatus
JPS6170015U (en) * 1984-10-16 1986-05-13
JPS6192056U (en) * 1984-11-22 1986-06-14

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5938017A (en) * 1982-08-25 1984-03-01 Mitsubishi Electric Corp Molding machine for semiconductor device
JPS59110126A (en) * 1982-12-16 1984-06-26 Toshiba Corp Mold package forming apparatus
JPS6170015U (en) * 1984-10-16 1986-05-13
JPS6192056U (en) * 1984-11-22 1986-06-14

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11390188B2 (en) 2018-01-29 2022-07-19 Ts Tech Co., Ltd. Latch device and vehicle seat

Also Published As

Publication number Publication date
JPH0747292B2 (en) 1995-05-24

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