JPS6378065U - - Google Patents
Info
- Publication number
- JPS6378065U JPS6378065U JP17182486U JP17182486U JPS6378065U JP S6378065 U JPS6378065 U JP S6378065U JP 17182486 U JP17182486 U JP 17182486U JP 17182486 U JP17182486 U JP 17182486U JP S6378065 U JPS6378065 U JP S6378065U
- Authority
- JP
- Japan
- Prior art keywords
- ring
- film
- holding ring
- holding
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000014759 maintenance of location Effects 0.000 claims 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17182486U JPH0523568Y2 (id) | 1986-11-08 | 1986-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17182486U JPH0523568Y2 (id) | 1986-11-08 | 1986-11-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6378065U true JPS6378065U (id) | 1988-05-24 |
| JPH0523568Y2 JPH0523568Y2 (id) | 1993-06-16 |
Family
ID=31107810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17182486U Expired - Lifetime JPH0523568Y2 (id) | 1986-11-08 | 1986-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0523568Y2 (id) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005042114A (ja) * | 2003-07-24 | 2005-02-17 | General Electric Co <Ge> | 薄膜の取り扱いを容易にする方法及び器具 |
| JP2019044249A (ja) * | 2017-09-06 | 2019-03-22 | キヤノン株式会社 | アライメント装置、および、成膜装置 |
-
1986
- 1986-11-08 JP JP17182486U patent/JPH0523568Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005042114A (ja) * | 2003-07-24 | 2005-02-17 | General Electric Co <Ge> | 薄膜の取り扱いを容易にする方法及び器具 |
| JP2019044249A (ja) * | 2017-09-06 | 2019-03-22 | キヤノン株式会社 | アライメント装置、および、成膜装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0523568Y2 (id) | 1993-06-16 |