JPS6378065U - - Google Patents

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Publication number
JPS6378065U
JPS6378065U JP17182486U JP17182486U JPS6378065U JP S6378065 U JPS6378065 U JP S6378065U JP 17182486 U JP17182486 U JP 17182486U JP 17182486 U JP17182486 U JP 17182486U JP S6378065 U JPS6378065 U JP S6378065U
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JP
Japan
Prior art keywords
ring
film
holding ring
holding
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17182486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0523568Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17182486U priority Critical patent/JPH0523568Y2/ja
Publication of JPS6378065U publication Critical patent/JPS6378065U/ja
Application granted granted Critical
Publication of JPH0523568Y2 publication Critical patent/JPH0523568Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
  • Coating Apparatus (AREA)
JP17182486U 1986-11-08 1986-11-08 Expired - Lifetime JPH0523568Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17182486U JPH0523568Y2 (enrdf_load_stackoverflow) 1986-11-08 1986-11-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17182486U JPH0523568Y2 (enrdf_load_stackoverflow) 1986-11-08 1986-11-08

Publications (2)

Publication Number Publication Date
JPS6378065U true JPS6378065U (enrdf_load_stackoverflow) 1988-05-24
JPH0523568Y2 JPH0523568Y2 (enrdf_load_stackoverflow) 1993-06-16

Family

ID=31107810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17182486U Expired - Lifetime JPH0523568Y2 (enrdf_load_stackoverflow) 1986-11-08 1986-11-08

Country Status (1)

Country Link
JP (1) JPH0523568Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002093576A (ja) * 2000-09-19 2002-03-29 Semiconductor Energy Lab Co Ltd 発光装置およびその作製方法
JP2005042114A (ja) * 2003-07-24 2005-02-17 General Electric Co <Ge> 薄膜の取り扱いを容易にする方法及び器具
JP2019044249A (ja) * 2017-09-06 2019-03-22 キヤノン株式会社 アライメント装置、および、成膜装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002093576A (ja) * 2000-09-19 2002-03-29 Semiconductor Energy Lab Co Ltd 発光装置およびその作製方法
JP2005042114A (ja) * 2003-07-24 2005-02-17 General Electric Co <Ge> 薄膜の取り扱いを容易にする方法及び器具
JP2019044249A (ja) * 2017-09-06 2019-03-22 キヤノン株式会社 アライメント装置、および、成膜装置

Also Published As

Publication number Publication date
JPH0523568Y2 (enrdf_load_stackoverflow) 1993-06-16

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