JPS6376722U - - Google Patents

Info

Publication number
JPS6376722U
JPS6376722U JP17001286U JP17001286U JPS6376722U JP S6376722 U JPS6376722 U JP S6376722U JP 17001286 U JP17001286 U JP 17001286U JP 17001286 U JP17001286 U JP 17001286U JP S6376722 U JPS6376722 U JP S6376722U
Authority
JP
Japan
Prior art keywords
conveyor
substrate
transmission roller
intermediate transmission
pulley
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17001286U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527373Y2 (US20100012521A1-20100121-C00001.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986170012U priority Critical patent/JPH0527373Y2/ja
Publication of JPS6376722U publication Critical patent/JPS6376722U/ja
Application granted granted Critical
Publication of JPH0527373Y2 publication Critical patent/JPH0527373Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Relays Between Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Separation, Sorting, Adjustment, Or Bending Of Sheets To Be Conveyed (AREA)
  • Specific Conveyance Elements (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP1986170012U 1986-11-04 1986-11-04 Expired - Lifetime JPH0527373Y2 (US20100012521A1-20100121-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986170012U JPH0527373Y2 (US20100012521A1-20100121-C00001.png) 1986-11-04 1986-11-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986170012U JPH0527373Y2 (US20100012521A1-20100121-C00001.png) 1986-11-04 1986-11-04

Publications (2)

Publication Number Publication Date
JPS6376722U true JPS6376722U (US20100012521A1-20100121-C00001.png) 1988-05-21
JPH0527373Y2 JPH0527373Y2 (US20100012521A1-20100121-C00001.png) 1993-07-13

Family

ID=31104351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986170012U Expired - Lifetime JPH0527373Y2 (US20100012521A1-20100121-C00001.png) 1986-11-04 1986-11-04

Country Status (1)

Country Link
JP (1) JPH0527373Y2 (US20100012521A1-20100121-C00001.png)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5662329A (en) * 1979-10-26 1981-05-28 Toshiba Corp Conveying direction turning device for semiconductor wafer
JPS5784146A (en) * 1980-11-14 1982-05-26 Fujitsu Ltd Detection of existence of wafer
JPS59117230A (ja) * 1982-12-24 1984-07-06 Hitachi Electronics Eng Co Ltd 部品移載装置
JPS59215800A (ja) * 1983-05-24 1984-12-05 松下電器産業株式会社 プリント基板搬送方向変換装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5662329A (en) * 1979-10-26 1981-05-28 Toshiba Corp Conveying direction turning device for semiconductor wafer
JPS5784146A (en) * 1980-11-14 1982-05-26 Fujitsu Ltd Detection of existence of wafer
JPS59117230A (ja) * 1982-12-24 1984-07-06 Hitachi Electronics Eng Co Ltd 部品移載装置
JPS59215800A (ja) * 1983-05-24 1984-12-05 松下電器産業株式会社 プリント基板搬送方向変換装置

Also Published As

Publication number Publication date
JPH0527373Y2 (US20100012521A1-20100121-C00001.png) 1993-07-13

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