JPS6376457U - - Google Patents
Info
- Publication number
- JPS6376457U JPS6376457U JP1986170958U JP17095886U JPS6376457U JP S6376457 U JPS6376457 U JP S6376457U JP 1986170958 U JP1986170958 U JP 1986170958U JP 17095886 U JP17095886 U JP 17095886U JP S6376457 U JPS6376457 U JP S6376457U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- double
- polishing device
- sided polishing
- gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 7
- 238000005498 polishing Methods 0.000 claims description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986170958U JPH0525809Y2 (es) | 1986-11-06 | 1986-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986170958U JPH0525809Y2 (es) | 1986-11-06 | 1986-11-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6376457U true JPS6376457U (es) | 1988-05-20 |
| JPH0525809Y2 JPH0525809Y2 (es) | 1993-06-29 |
Family
ID=31106152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986170958U Expired - Lifetime JPH0525809Y2 (es) | 1986-11-06 | 1986-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0525809Y2 (es) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02130748U (es) * | 1989-03-30 | 1990-10-29 | ||
| JP2009006423A (ja) * | 2007-06-27 | 2009-01-15 | Hoya Corp | 磁気ディスク用ガラス基板の製造方法及び磁気ディスクの製造方法並びに研磨装置 |
| JP2009039827A (ja) * | 2007-08-09 | 2009-02-26 | Fujitsu Ltd | 研磨装置、基板及び電子機器の製造方法 |
| JP2019069499A (ja) * | 2017-10-11 | 2019-05-09 | 株式会社ファインサーフェス技術 | 研磨装置、研磨方法、及び研磨キャリア |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5775961U (es) * | 1980-10-30 | 1982-05-11 |
-
1986
- 1986-11-06 JP JP1986170958U patent/JPH0525809Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5775961U (es) * | 1980-10-30 | 1982-05-11 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02130748U (es) * | 1989-03-30 | 1990-10-29 | ||
| JP2009006423A (ja) * | 2007-06-27 | 2009-01-15 | Hoya Corp | 磁気ディスク用ガラス基板の製造方法及び磁気ディスクの製造方法並びに研磨装置 |
| JP2009039827A (ja) * | 2007-08-09 | 2009-02-26 | Fujitsu Ltd | 研磨装置、基板及び電子機器の製造方法 |
| JP2019069499A (ja) * | 2017-10-11 | 2019-05-09 | 株式会社ファインサーフェス技術 | 研磨装置、研磨方法、及び研磨キャリア |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0525809Y2 (es) | 1993-06-29 |