JPS6376388U - - Google Patents

Info

Publication number
JPS6376388U
JPS6376388U JP16904186U JP16904186U JPS6376388U JP S6376388 U JPS6376388 U JP S6376388U JP 16904186 U JP16904186 U JP 16904186U JP 16904186 U JP16904186 U JP 16904186U JP S6376388 U JPS6376388 U JP S6376388U
Authority
JP
Japan
Prior art keywords
mirror
intermediate chamber
electron beam
chamber
lens system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16904186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0435023Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16904186U priority Critical patent/JPH0435023Y2/ja
Publication of JPS6376388U publication Critical patent/JPS6376388U/ja
Application granted granted Critical
Publication of JPH0435023Y2 publication Critical patent/JPH0435023Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP16904186U 1986-11-05 1986-11-05 Expired JPH0435023Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16904186U JPH0435023Y2 (enrdf_load_stackoverflow) 1986-11-05 1986-11-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16904186U JPH0435023Y2 (enrdf_load_stackoverflow) 1986-11-05 1986-11-05

Publications (2)

Publication Number Publication Date
JPS6376388U true JPS6376388U (enrdf_load_stackoverflow) 1988-05-20
JPH0435023Y2 JPH0435023Y2 (enrdf_load_stackoverflow) 1992-08-19

Family

ID=31102483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16904186U Expired JPH0435023Y2 (enrdf_load_stackoverflow) 1986-11-05 1986-11-05

Country Status (1)

Country Link
JP (1) JPH0435023Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0435023Y2 (enrdf_load_stackoverflow) 1992-08-19

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