JPS6375857U - - Google Patents
Info
- Publication number
- JPS6375857U JPS6375857U JP1986170831U JP17083186U JPS6375857U JP S6375857 U JPS6375857 U JP S6375857U JP 1986170831 U JP1986170831 U JP 1986170831U JP 17083186 U JP17083186 U JP 17083186U JP S6375857 U JPS6375857 U JP S6375857U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- gas sensor
- metal oxide
- sno2
- insulating metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims description 4
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims 2
- 238000001514 detection method Methods 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986170831U JPH0634680Y2 (ja) | 1986-11-05 | 1986-11-05 | 可燃性ガスセンサ− |
| KR1019870012099A KR960016712B1 (ko) | 1986-11-05 | 1987-10-30 | 가스센서 및 그의 제조방법 |
| FR878715196A FR2606150B1 (fr) | 1986-11-05 | 1987-11-03 | Detecteur de gaz et procede pour le fabriquer |
| CA000551002A CA1292298C (en) | 1986-11-05 | 1987-11-04 | Gas sensor and method of manufacturing the same |
| US07/116,986 US4897628A (en) | 1986-11-05 | 1987-11-05 | Gas sensor and method of manufacturing the same |
| GB8725989A GB2198240B (en) | 1986-11-05 | 1987-11-05 | Gas sensor and method of manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986170831U JPH0634680Y2 (ja) | 1986-11-05 | 1986-11-05 | 可燃性ガスセンサ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6375857U true JPS6375857U (US20100012521A1-20100121-C00001.png) | 1988-05-20 |
| JPH0634680Y2 JPH0634680Y2 (ja) | 1994-09-07 |
Family
ID=31105904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986170831U Expired - Lifetime JPH0634680Y2 (ja) | 1986-11-05 | 1986-11-05 | 可燃性ガスセンサ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0634680Y2 (US20100012521A1-20100121-C00001.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010054205A (ja) * | 2008-08-26 | 2010-03-11 | Tottori Univ | ガスセンサ、センサ素子の製造方法及びガス検出方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58221154A (ja) * | 1982-06-18 | 1983-12-22 | Hitachi Ltd | ガスセンサ素子 |
-
1986
- 1986-11-05 JP JP1986170831U patent/JPH0634680Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58221154A (ja) * | 1982-06-18 | 1983-12-22 | Hitachi Ltd | ガスセンサ素子 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010054205A (ja) * | 2008-08-26 | 2010-03-11 | Tottori Univ | ガスセンサ、センサ素子の製造方法及びガス検出方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0634680Y2 (ja) | 1994-09-07 |
