JPS6375833U - - Google Patents

Info

Publication number
JPS6375833U
JPS6375833U JP17006286U JP17006286U JPS6375833U JP S6375833 U JPS6375833 U JP S6375833U JP 17006286 U JP17006286 U JP 17006286U JP 17006286 U JP17006286 U JP 17006286U JP S6375833 U JPS6375833 U JP S6375833U
Authority
JP
Japan
Prior art keywords
housing
recess
diaphragm
sensor chip
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17006286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17006286U priority Critical patent/JPS6375833U/ja
Publication of JPS6375833U publication Critical patent/JPS6375833U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP17006286U 1986-11-05 1986-11-05 Pending JPS6375833U (nl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17006286U JPS6375833U (nl) 1986-11-05 1986-11-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17006286U JPS6375833U (nl) 1986-11-05 1986-11-05

Publications (1)

Publication Number Publication Date
JPS6375833U true JPS6375833U (nl) 1988-05-20

Family

ID=31104447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17006286U Pending JPS6375833U (nl) 1986-11-05 1986-11-05

Country Status (1)

Country Link
JP (1) JPS6375833U (nl)

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