JPS61192460U - - Google Patents
Info
- Publication number
- JPS61192460U JPS61192460U JP7584585U JP7584585U JPS61192460U JP S61192460 U JPS61192460 U JP S61192460U JP 7584585 U JP7584585 U JP 7584585U JP 7584585 U JP7584585 U JP 7584585U JP S61192460 U JPS61192460 U JP S61192460U
- Authority
- JP
- Japan
- Prior art keywords
- covered
- pressure sensor
- piezoresistive element
- silicon
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7584585U JPS61192460U (nl) | 1985-05-22 | 1985-05-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7584585U JPS61192460U (nl) | 1985-05-22 | 1985-05-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61192460U true JPS61192460U (nl) | 1986-11-29 |
Family
ID=30617443
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7584585U Pending JPS61192460U (nl) | 1985-05-22 | 1985-05-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61192460U (nl) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001281085A (ja) * | 2000-03-28 | 2001-10-10 | Toyoda Mach Works Ltd | 半導体圧力センサ及びその製造方法 |
-
1985
- 1985-05-22 JP JP7584585U patent/JPS61192460U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001281085A (ja) * | 2000-03-28 | 2001-10-10 | Toyoda Mach Works Ltd | 半導体圧力センサ及びその製造方法 |