JPS6375709A - Manufacture of distributed film thickness - Google Patents
Manufacture of distributed film thicknessInfo
- Publication number
- JPS6375709A JPS6375709A JP21978586A JP21978586A JPS6375709A JP S6375709 A JPS6375709 A JP S6375709A JP 21978586 A JP21978586 A JP 21978586A JP 21978586 A JP21978586 A JP 21978586A JP S6375709 A JPS6375709 A JP S6375709A
- Authority
- JP
- Japan
- Prior art keywords
- film
- light
- substance
- product
- irradiated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- 239000000126 substance Substances 0.000 claims description 29
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 17
- 230000007423 decrease Effects 0.000 abstract description 2
- 229920000642 polymer Polymers 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- 239000000047 product Substances 0.000 description 7
- WOGITNXCNOTRLK-VOTSOKGWSA-N (e)-3-phenylprop-2-enoyl chloride Chemical compound ClC(=O)\C=C\C1=CC=CC=C1 WOGITNXCNOTRLK-VOTSOKGWSA-N 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00278—Lenticular sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00269—Fresnel lenses
Landscapes
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Ophthalmology & Optometry (AREA)
- Mechanical Engineering (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔概 要〕
膜厚分布膜の作製方法であって、光反応性物質を含む膜
に局部的に光照射し、核部に光反応生成物を生成し、該
光反応生成物に前記光反応性物質又は他の物質を吸収さ
せて膨潤させることにより膜厚分布膜の形成を可能とす
る。[Detailed Description of the Invention] [Summary] A method for producing a thickness distribution film, in which a film containing a photoreactive substance is locally irradiated with light, a photoreaction product is generated in the core part, and the light By making the reaction product absorb the photoreactive substance or other substance and causing it to swell, it is possible to form a thickness distribution film.
本発明は光通信用の光学装置等に用いられるレンズ、光
導波路、回折格子などの作製方法に関するもので、さら
に詳しく言えば、その形状変化を起させる方法に関する
ものである。The present invention relates to a method for manufacturing lenses, optical waveguides, diffraction gratings, etc. used in optical devices for optical communications, and more specifically, to a method for causing changes in their shapes.
光通信用の光学装置にはセンサ用マイクロレンズアレイ
、ＣＤ用マイクロレンズなど短焦点のマイクロレンズが
望まれている。また光導波路は損失の小さいもの、回折
格子は効率の良いものが望まれている。有機高分子膜に
局部的に光を照射してレンズ等を作製する方法が開発さ
れているが、前記の要求を満たすためには膜の形状変化
を大きくする必要がある。Short-focus microlenses such as microlens arrays for sensors and microlenses for CDs are desired for optical devices for optical communication. Furthermore, it is desired that the optical waveguide has low loss and the diffraction grating has high efficiency. A method has been developed for manufacturing lenses and the like by locally irradiating an organic polymer film with light, but in order to meet the above requirements, it is necessary to increase the change in the shape of the film.
従来の膜形状分布膜の作製法としては、光反応性物質を
均一に混ぜた膜に局部的に光照射して光反応生成物の分
布をつくり、アニールにより未反応光反応性物質を除去
することにより、膜厚分布をつくる方法と、光来照射領
域から光照射領域への光反応性物質の拡散のみを利用し
た方法とがある。The conventional method for producing film shape distribution films is to locally irradiate a film uniformly mixed with photoreactive substances to create a distribution of photoreaction products, and then remove unreacted photoreactive substances by annealing. There are two methods: one method that creates a film thickness distribution, and the other method that utilizes only the diffusion of the photoreactive substance from the light irradiation area to the light irradiation area.
前者は光導波路作製に利用されており、後者はホログラ
ムの形成に利用されているが、もともと光分布を膜の密
度分布（屈折率分布）とするための方法であり、膜の形
状変化は非常に小さい。The former is used to fabricate optical waveguides, and the latter is used to form holograms, but this method was originally used to make the light distribution the density distribution (refractive index distribution) of the film, and changes in the shape of the film are extremely difficult. small.
上記従来の方法では膜形状変化を大きくできないという
欠点があった。The conventional method described above has the disadvantage that it is not possible to greatly change the shape of the film.
本発明はこのような点に鑑みて創作されたもので膜形状
変化の大きい膜厚分布膜の作製方法を提供することを目
的としている。The present invention was created in view of the above points, and an object of the present invention is to provide a method for producing a thickness distribution film that exhibits large changes in film shape.
第１図は本発明の詳細な説明するための図である。 FIG. 1 is a diagram for explaining the present invention in detail.
本発明は先ず第１図ａに示すように少なくとも光反応性
物質Ｍを含む膜１にマスク２を用いて局部的に光３を照
射し、該光照射領域Ｒで第１図すの如く光反応性物質Ｍ
から光反応生成物ｍを生成させて膜厚分布膜を形成する
のである。In the present invention, first, as shown in FIG. 1a, a film 1 containing at least a photoreactive substance M is locally irradiated with light 3 using a mask 2. reactive substance M
A photoreaction product m is generated from the photoreaction product m to form a thickness distribution film.
光照射領域Ｒでは光反応性物質Ｍから生成した光反応生
成物ｍが物質Ｍ’（Ｍ’＝ＭでもＭ′≠Ｍでも良い）を
吸収して膨潤し、光照射領域Ｒでは膜厚が増し、光来照
射領域Ｑでは膜厚が減小するため大きな形状変化が可能
となる。In the light irradiation area R, the photoreaction product m generated from the photoreactive substance M absorbs the substance M'(M'=M or M'≠M) and swells, and in the light irradiation area R, the film thickness increases. In addition, the film thickness decreases in the light irradiation region Q, allowing for a large change in shape.
第１図により本実施例を説明する。膜１は光重合反応物
質Ｍとパインディング用高分子Ｐからなる。物質Ｍとし
ては、膜１中で拡散し、この物質Ｍに光照射して生成さ
れた物質ｍが物質Ｍ又はＭ’（Ｍ’はＭと等しいもので
も他のものでも良い）を吸収して膨潤するものを選ぶ。This embodiment will be explained with reference to FIG. The film 1 consists of a photopolymerization reaction substance M and a binding polymer P. The substance M is diffused in the film 1, and a substance m generated by irradiating this substance M with light absorbs the substance M or M'(M' may be equal to M or something else). Choose one that swells.
例えば光重合反応物質Ｍには塩化シンナモイル（モノマ
）を、Ｍ′には塩化シンナモイルに溶媒として１．４−
ジオキサンを加えたもの、又はメタクリル酸メチルのオ
リゴマ等を用いることができる。For example, for the photopolymerization reaction material M, cinnamoyl chloride (monomer) is used, and for M', cinnamoyl chloride is used as a solvent and 1.4-
Those to which dioxane is added or oligomers of methyl methacrylate can be used.
上記の膜１にマスク２を用いて局部的に光３を照射する
と、光照射領域Ｒでは光反応生成物ｍが生成され、この
物’１ｍに物［Ｍ又はＭ′が吸収される。この吸収され
た物質Ｍが光照射されて物質ｍとなり、さらにこの物質
ｍが光来照射領域Ｑから拡散してきた′ｊｊ！！５質Ｍ
又はＭ′を吸収して膨潤する。When the above film 1 is locally irradiated with light 3 using a mask 2, a photoreaction product m is generated in the light irradiation region R, and the substance [M or M' is absorbed by this substance '1m'. This absorbed substance M is irradiated with light and becomes substance m, and this substance m further diffuses from the light irradiation area Q'jj! ! 5 quality M
Or it absorbs M' and swells.
このようにして光照射領域Ｒは物ＴｔＭが供給される限
り膨潤を続けるので膜の形状変化は非常に大きくなる。In this way, the light irradiation region R continues to swell as long as the substance TtM is supplied, so that the change in the shape of the film becomes very large.
以上説明してきたように、本発明によれば、光照射によ
り膨潤が誘起されるので大きな膜形状変化が得られ、さ
らに重力等の外力を排した系においては膜中の光反応性
物質が涸渇するまで体積膨張が続き、形状変化の大きい
膜厚分布膜を形成することができ、実用的には極めて有
用である。As explained above, according to the present invention, swelling is induced by light irradiation, so a large change in membrane shape can be obtained, and furthermore, in a system where external forces such as gravity are excluded, photoreactive substances in the membrane are depleted. It is possible to form a film with a thickness distribution that has a large change in shape, and is extremely useful from a practical point of view.
第１図は本発明の詳細な説明するための図である。 第１図において ｌは光反応性物質を含む膜、 ２はマスク、 ３は光、 Ｍは光反応性物質、 Ｍ′はＭ又は他の物質、 ｍは光反応生成物、 Ｑは光来照射領域、 Ｒは光照射領域である。 FIG. 1 is a diagram for explaining the present invention in detail. In Figure 1 l is a film containing a photoreactive substance; 2 is a mask, 3 is light, M is a photoreactive substance, M' is M or other substance, m is a photoreaction product, Q is the light irradiation area, R is a light irradiation area.
Claims (1)
部的に光を照射し、 光照射領域（Ｒ）において光反応生成物（ｍ）を生成し
、 該光反応生成物（ｍ）に物質（Ｍ′）を吸収させて膨潤
させ膜厚分布膜を作製することを特徴とする膜厚分布膜
の作製方法。 ２、上記物質（Ｍ′）が光反応性物質（Ｍ）と等しいも
のであることを特徴とする特許請求の範囲第１項記載の
膜厚分布膜の作製方法。[Claims] 1. Locally irradiating the film (1) containing at least the photoreactive substance (M) with light to generate a photoreaction product (m) in the light irradiation region (R); A method for producing a thickness distribution film, which comprises making a photoreaction product (m) absorb a substance (M') and swell to produce a thickness distribution film. 2. The method for producing a thickness distribution film according to claim 1, wherein the substance (M') is the same as the photoreactive substance (M).
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21978586A JPS6375709A (en) | 1986-09-19 | 1986-09-19 | Manufacture of distributed film thickness |
| CA000542888A CA1294470C (en) | 1986-07-26 | 1987-07-23 | Process for the production of optical elements |
| US07/077,337 US4877717A (en) | 1986-07-26 | 1987-07-24 | Process for the production of optical elements |
| EP87306609A EP0258994B1 (en) | 1986-07-26 | 1987-07-27 | Process for the production of optical elements |
| DE8787306609T DE3782783T2 (en) | 1986-07-26 | 1987-07-27 | METHOD FOR PRODUCING OPTICAL COMPONENTS. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21978586A JPS6375709A (en) | 1986-09-19 | 1986-09-19 | Manufacture of distributed film thickness |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6375709A true JPS6375709A (en) | 1988-04-06 |
Family
ID=16740971
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21978586A Pending JPS6375709A (en) | 1986-07-26 | 1986-09-19 | Manufacture of distributed film thickness |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6375709A (en) |
-
1986
- 1986-09-19 JP JP21978586A patent/JPS6375709A/en active Pending
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