JPS6375036U - - Google Patents

Info

Publication number
JPS6375036U
JPS6375036U JP10385387U JP10385387U JPS6375036U JP S6375036 U JPS6375036 U JP S6375036U JP 10385387 U JP10385387 U JP 10385387U JP 10385387 U JP10385387 U JP 10385387U JP S6375036 U JPS6375036 U JP S6375036U
Authority
JP
Japan
Prior art keywords
turntable
cradle
container
wafers
continuous automatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10385387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0229720Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987103853U priority Critical patent/JPH0229720Y2/ja
Publication of JPS6375036U publication Critical patent/JPS6375036U/ja
Application granted granted Critical
Publication of JPH0229720Y2 publication Critical patent/JPH0229720Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Centrifugal Separators (AREA)
JP1987103853U 1987-07-08 1987-07-08 Expired JPH0229720Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987103853U JPH0229720Y2 (enExample) 1987-07-08 1987-07-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987103853U JPH0229720Y2 (enExample) 1987-07-08 1987-07-08

Publications (2)

Publication Number Publication Date
JPS6375036U true JPS6375036U (enExample) 1988-05-19
JPH0229720Y2 JPH0229720Y2 (enExample) 1990-08-09

Family

ID=30976801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987103853U Expired JPH0229720Y2 (enExample) 1987-07-08 1987-07-08

Country Status (1)

Country Link
JP (1) JPH0229720Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016187781A (ja) * 2015-03-30 2016-11-04 トミー工業株式会社 遠心分離機

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5032750A (enExample) * 1973-07-27 1975-03-29
JPS5040946A (enExample) * 1973-04-13 1975-04-15
JPS5478079A (en) * 1977-12-05 1979-06-21 Hitachi Ltd Wafer washing and drying unit

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5040946A (enExample) * 1973-04-13 1975-04-15
JPS5032750A (enExample) * 1973-07-27 1975-03-29
JPS5478079A (en) * 1977-12-05 1979-06-21 Hitachi Ltd Wafer washing and drying unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016187781A (ja) * 2015-03-30 2016-11-04 トミー工業株式会社 遠心分離機

Also Published As

Publication number Publication date
JPH0229720Y2 (enExample) 1990-08-09

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