JPS637456B2 - - Google Patents
Info
- Publication number
- JPS637456B2 JPS637456B2 JP9583881A JP9583881A JPS637456B2 JP S637456 B2 JPS637456 B2 JP S637456B2 JP 9583881 A JP9583881 A JP 9583881A JP 9583881 A JP9583881 A JP 9583881A JP S637456 B2 JPS637456 B2 JP S637456B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- vapor deposition
- pyroelectric
- heating
- metal vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007740 vapor deposition Methods 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000012528 membrane Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000005019 vapor deposition process Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
Landscapes
- Radiation Pyrometers (AREA)
- Physical Vapour Deposition (AREA)
Description
【発明の詳細な説明】
本発明は高分子焦電フイルムによる焦電素子の
製造方法に関するもので、金属蒸着強度を強く
し、性能を改善する一方、量産性に優れた製造方
法を提供することを目的とする。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a pyroelectric element using a polymer pyroelectric film, and an object of the present invention is to provide a manufacturing method that increases the strength of metal vapor deposition, improves performance, and is excellent in mass production. With the goal.
この種の焦電素子として高分子焦電フイルムの
両面に金属蒸着を施したものがある。しかし、蒸
着強度が弱いため、はがれ等によるノイズが発生
しやすく、また、フイルム状のため温度によつて
は膜にたるみが生じ性能が低下するなどの欠点が
あつた。 As this type of pyroelectric element, there is one in which metal vapor deposition is performed on both sides of a polymer pyroelectric film. However, since the vapor deposition strength is weak, noise is likely to be generated due to peeling, and since the film is in the form of a film, the film may sag depending on the temperature, resulting in a decrease in performance.
本発明はこれらの欠点を除去したもので以下図
面の一実施例により説明する。第1図は焦電フイ
ルムをフレームに固定する工程図で同図aにおい
て1,2はフレーム、3は焦電フイルム、4は固
定台である。この場合フレーム1,2には同図c
のように凹溝1a,2aを有し、ゴム材2bを設
け、同図dのようにフレーム1,2間に焦電フイ
ルム3をはさみ、固定する際に同ゴム材2bによ
りある均一なテンシヨンがかけられるようにして
いる。 The present invention eliminates these drawbacks and will be explained below with reference to an embodiment of the drawings. FIG. 1 is a process diagram for fixing a pyroelectric film to a frame. In FIG. In this case, frames 1 and 2 are
The pyroelectric film 3 is sandwiched between the frames 1 and 2 as shown in FIG. is set so that it can be applied.
同図bはフレーム2の下面より固定台4を対応
させた状態を示す。 Figure b shows a state in which the fixing base 4 is attached to the lower surface of the frame 2.
第2図は蒸着工程を説明するための図で、まず
同図aの如くフレーム1,2間に固定された焦電
フイルム3の+面(フレーム2側)を蒸着方向と
し、固定台4にセツトし、+面側を先に蒸着する。
なお蒸着にあたつてフイルム3は洗浄され、かつ
乾燥状態にある。 FIG. 2 is a diagram for explaining the vapor deposition process. First, the positive side (frame 2 side) of the pyroelectric film 3 fixed between the frames 1 and 2 as shown in FIG. and deposit the positive side first.
Note that during vapor deposition, the film 3 is washed and kept in a dry state.
次に同図bの如くフレーム1,2を反転し、ヒ
ータ6aを有する加熱治具6をセツトし、加熱し
つつ一面側に金属蒸着を行なう。このように加熱
蒸着法を用いるのは、蒸着強度を上げるためで焦
電フイルム3の物性的に許す限り、加熱温度は高
いことが望ましいが、焦電効果との関係から60〜
70℃とすることが望ましい。また、蒸着金属とし
ては焦電フイルム3への赤外光の吸収効率の高い
NiCr、Ni、Al等が望ましい。 Next, as shown in FIG. 2B, the frames 1 and 2 are reversed, a heating jig 6 having a heater 6a is set, and metal vapor deposition is performed on one side while heating. The purpose of using the heating evaporation method is to increase the evaporation strength, and it is desirable that the heating temperature be as high as the physical properties of the pyroelectric film 3 allow.
It is desirable to set the temperature to 70℃. In addition, as a vapor-deposited metal, the pyroelectric film 3 has a high absorption efficiency of infrared light.
NiCr, Ni, Al, etc. are preferable.
なお前記では一側の片面のみ加熱蒸着している
が、両面加熱蒸着してもよいが、先に蒸着した側
の強度は後で行つた側に比べ低下する。これは後
で蒸着をおこなう時にその際の熱によりフイルム
3が伸び蒸着した金属面とフイルム3の伸び率の
違いにより蒸着面にクラツク等が入るためであ
る。 In the above description, only one side is heated and vapor-deposited, but both sides may be heated and vapor-deposited, but the strength of the side that is vapor-deposited first is lower than that of the side that is vapor-deposited later. This is because when vapor deposition is performed later, the film 3 will stretch due to the heat generated during the vapor deposition, and cracks will occur on the vapor deposition surface due to the difference in elongation rate between the metal surface on which the vapor deposition is applied and the film 3.
第3図は膜リング7の接着工程を示したもので
同図aは複数のリング7を焦電フイルム3の一面
におき、クツシヨン材8を介して重り9をおいた
状態を示す。 FIG. 3 shows the process of adhering the membrane rings 7, and FIG. 3a shows a state in which a plurality of rings 7 are placed on one surface of the pyroelectric film 3, and a weight 9 is placed with a cushion material 8 interposed therebetween.
同図bはその一部の拡大図で、10は接着剤で
ある。 Figure b is an enlarged view of a portion thereof, and numeral 10 indicates an adhesive.
第4図はダイセツト11でもつて第5図のよう
に膜リング7にそつて切断する工程を示す。 FIG. 4 shows the step of cutting along the membrane ring 7 using the die set 11 as shown in FIG.
なお膜リング7を接着するにあたつてその接着
温度は蒸着時の加熱温度より低いと膜リング7内
のフイルム3がたわんだ状態で接着固定されるこ
とがあるので加熱温度と同等あるいはそれ以上
(70〜80℃)が望ましい。 Note that when bonding the membrane ring 7, the bonding temperature should be equal to or higher than the heating temperature because if the bonding temperature is lower than the heating temperature during vapor deposition, the film 3 inside the membrane ring 7 may be bonded and fixed in a bent state. (70-80℃) is desirable.
ただし、ポーリング温度以上になると焦電効果
の点もあるのでそれ以下である必要がある。 However, since there is a pyroelectric effect when the temperature exceeds the Pauling temperature, the temperature must be lower than that.
また膜リング7を+側の面に接着固定する場合
には前記と逆にすればよい。 Further, when the membrane ring 7 is adhesively fixed to the + side surface, the above procedure may be reversed.
以上本発明によれば焦電フイルムへの金属蒸着
強度を強くできるので、特別にコロナ放電で表面
をならしたりする必要がなく製造も容易である。 As described above, according to the present invention, the strength of metal vapor deposition on the pyroelectric film can be increased, so that there is no need to specially smooth the surface by corona discharge, and manufacturing is easy.
また形成された焦電素子も金属蒸着強度が強い
ので焦電素子としての性能の向上、ならびに信頼
性の向上がはかれる。 Furthermore, since the formed pyroelectric element also has strong metal vapor deposition strength, it is possible to improve the performance and reliability of the pyroelectric element.
図面は本発明の一実施例である焦電素子の製造
方法を示すものであつて、第1図は焦電フイルム
をフレームに固定する工程を示す工程図、第2図
は蒸着工程を示す工程図、第3図は膜リングを固
定する工程を示す工程図、第4図は膜リングにそ
つて切断する工程を示す工程図、第5図は上記工
程により製造された焦電素子の斜視図である。
1,2……フレーム、2b……ゴム材、3……
焦電フイルム、4……固定台、6……加熱治具、
7……膜リング、8……クツシヨン材、9……重
り、10……接着剤、11……ダイセツト。
The drawings show a method of manufacturing a pyroelectric element according to an embodiment of the present invention, in which FIG. 1 is a process diagram showing the process of fixing a pyroelectric film to a frame, and FIG. 2 is a process diagram showing a vapor deposition process. Figure 3 is a process diagram showing the process of fixing the membrane ring, Figure 4 is a process diagram showing the process of cutting along the membrane ring, and Figure 5 is a perspective view of the pyroelectric element manufactured by the above process. It is. 1, 2...Frame, 2b...Rubber material, 3...
Pyroelectric film, 4...fixing stand, 6...heating jig,
7... Membrane ring, 8... Cushion material, 9... Weight, 10... Adhesive, 11... Die set.
Claims (1)
間に焦電フイルムを保持した状態で上記フイルム
の一方の面に金属蒸着し、他方の面に加熱による
金属蒸着をそれぞれ施してから、上記加熱による
金属蒸着面側に膜リングを接着固定し、その後膜
リングにそつて切断することを特徴とする焦電素
子の製造方法。 2 加熱による金属蒸着温度は60〜70℃とし膜リ
ングを70〜80℃に加熱して固定することを特徴と
する特許請求の範囲第1項記載の焦電素子の製造
方法。[Scope of Claims] 1. A pyroelectric film is held between frames having a rubber ring on at least one side, and metal vapor deposition is performed on one surface of the film, and metal vapor deposition is performed on the other surface by heating. A method for manufacturing a pyroelectric element, characterized in that a film ring is adhesively fixed to the metal vapor-deposited surface side by the above-mentioned heating, and then cut along the film ring. 2. The method of manufacturing a pyroelectric element according to claim 1, wherein the metal vapor deposition temperature by heating is 60 to 70°C, and the film ring is fixed by heating to 70 to 80°C.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9583881A JPS57210618A (en) | 1981-06-19 | 1981-06-19 | Method of producing pyroelectric element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9583881A JPS57210618A (en) | 1981-06-19 | 1981-06-19 | Method of producing pyroelectric element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57210618A JPS57210618A (en) | 1982-12-24 |
JPS637456B2 true JPS637456B2 (en) | 1988-02-17 |
Family
ID=14148517
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9583881A Granted JPS57210618A (en) | 1981-06-19 | 1981-06-19 | Method of producing pyroelectric element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57210618A (en) |
-
1981
- 1981-06-19 JP JP9583881A patent/JPS57210618A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS57210618A (en) | 1982-12-24 |
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