JPS6374267U - - Google Patents

Info

Publication number
JPS6374267U
JPS6374267U JP1986167053U JP16705386U JPS6374267U JP S6374267 U JPS6374267 U JP S6374267U JP 1986167053 U JP1986167053 U JP 1986167053U JP 16705386 U JP16705386 U JP 16705386U JP S6374267 U JPS6374267 U JP S6374267U
Authority
JP
Japan
Prior art keywords
recess
identification mark
letter
symbol
filled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986167053U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0644594Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986167053U priority Critical patent/JPH0644594Y2/ja
Publication of JPS6374267U publication Critical patent/JPS6374267U/ja
Application granted granted Critical
Publication of JPH0644594Y2 publication Critical patent/JPH0644594Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986167053U 1986-10-30 1986-10-30 セラミック盤 Expired - Lifetime JPH0644594Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986167053U JPH0644594Y2 (ja) 1986-10-30 1986-10-30 セラミック盤

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986167053U JPH0644594Y2 (ja) 1986-10-30 1986-10-30 セラミック盤

Publications (2)

Publication Number Publication Date
JPS6374267U true JPS6374267U (ko) 1988-05-18
JPH0644594Y2 JPH0644594Y2 (ja) 1994-11-16

Family

ID=31098620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986167053U Expired - Lifetime JPH0644594Y2 (ja) 1986-10-30 1986-10-30 セラミック盤

Country Status (1)

Country Link
JP (1) JPH0644594Y2 (ko)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01301056A (ja) * 1988-05-25 1989-12-05 Showa Denko Kk セラミックス製トッププレート
JPH0499829U (ko) * 1991-02-05 1992-08-28
WO2007086529A1 (ja) * 2006-01-25 2007-08-02 Jsr Corporation 化学機械研磨パッドおよびその製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55105468U (ko) * 1979-01-17 1980-07-23
JPS58155168A (ja) * 1982-03-04 1983-09-14 Fujikoshi Kikai Kogyo Kk ポリシング用セラミツク定盤の固定装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55105468U (ko) * 1979-01-17 1980-07-23
JPS58155168A (ja) * 1982-03-04 1983-09-14 Fujikoshi Kikai Kogyo Kk ポリシング用セラミツク定盤の固定装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01301056A (ja) * 1988-05-25 1989-12-05 Showa Denko Kk セラミックス製トッププレート
JPH0499829U (ko) * 1991-02-05 1992-08-28
WO2007086529A1 (ja) * 2006-01-25 2007-08-02 Jsr Corporation 化学機械研磨パッドおよびその製造方法

Also Published As

Publication number Publication date
JPH0644594Y2 (ja) 1994-11-16

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