JPS6374267U - - Google Patents

Info

Publication number
JPS6374267U
JPS6374267U JP1986167053U JP16705386U JPS6374267U JP S6374267 U JPS6374267 U JP S6374267U JP 1986167053 U JP1986167053 U JP 1986167053U JP 16705386 U JP16705386 U JP 16705386U JP S6374267 U JPS6374267 U JP S6374267U
Authority
JP
Japan
Prior art keywords
recess
identification mark
letter
symbol
filled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986167053U
Other languages
Japanese (ja)
Other versions
JPH0644594Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986167053U priority Critical patent/JPH0644594Y2/en
Publication of JPS6374267U publication Critical patent/JPS6374267U/ja
Application granted granted Critical
Publication of JPH0644594Y2 publication Critical patent/JPH0644594Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案セラミツク盤としての研磨台の
斜視図、第２図は第１図におけるＡ―Ａ線断面図
である。 Ｌ：研磨台、Ｅ：凹部、Ｓ：識別標識、Ｔ：透
明体。 FIG. 1 is a perspective view of a polishing table as a ceramic disk of the present invention, and FIG. 2 is a sectional view taken along the line AA in FIG. 1. L: polishing table, E: recess, S: identification mark, T: transparent body.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] セラミツク体に凹部を形成し、該凹部の底面に
文字、記号、図面などの識別標識を施すとともに
凹部中に透明体が充填されていることを特徴とす
るセラミツク盤。 A ceramic disk characterized in that a recess is formed in a ceramic body, an identification mark such as a letter, symbol, or drawing is provided on the bottom of the recess, and a transparent material is filled in the recess.
JP1986167053U 1986-10-30 1986-10-30 Ceramic board Expired - Lifetime JPH0644594Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986167053U JPH0644594Y2 (en) 1986-10-30 1986-10-30 Ceramic board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986167053U JPH0644594Y2 (en) 1986-10-30 1986-10-30 Ceramic board

Publications (2)

Publication Number Publication Date
JPS6374267U true JPS6374267U (en) 1988-05-18
JPH0644594Y2 JPH0644594Y2 (en) 1994-11-16

Family

ID=31098620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986167053U Expired - Lifetime JPH0644594Y2 (en) 1986-10-30 1986-10-30 Ceramic board

Country Status (1)

Country Link
JP (1) JPH0644594Y2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01301056A (en) * 1988-05-25 1989-12-05 Showa Denko Kk Ceramic top plate
JPH0499829U (en) * 1991-02-05 1992-08-28
WO2007086529A1 (en) * 2006-01-25 2007-08-02 Jsr Corporation Chemical mechanical polishing pad and method for manufacturing same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55105468U (en) * 1979-01-17 1980-07-23
JPS58155168A (en) * 1982-03-04 1983-09-14 Fujikoshi Kikai Kogyo Kk Apparatus for fixing polishing ceramic surface plate

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55105468U (en) * 1979-01-17 1980-07-23
JPS58155168A (en) * 1982-03-04 1983-09-14 Fujikoshi Kikai Kogyo Kk Apparatus for fixing polishing ceramic surface plate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01301056A (en) * 1988-05-25 1989-12-05 Showa Denko Kk Ceramic top plate
JPH0499829U (en) * 1991-02-05 1992-08-28
WO2007086529A1 (en) * 2006-01-25 2007-08-02 Jsr Corporation Chemical mechanical polishing pad and method for manufacturing same

Also Published As

Publication number Publication date
JPH0644594Y2 (en) 1994-11-16

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