JPS6372373U - - Google Patents
Info
- Publication number
- JPS6372373U JPS6372373U JP16725386U JP16725386U JPS6372373U JP S6372373 U JPS6372373 U JP S6372373U JP 16725386 U JP16725386 U JP 16725386U JP 16725386 U JP16725386 U JP 16725386U JP S6372373 U JPS6372373 U JP S6372373U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- cavity
- casing
- inlet
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16725386U JPS6372373U (sv) | 1986-10-30 | 1986-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16725386U JPS6372373U (sv) | 1986-10-30 | 1986-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6372373U true JPS6372373U (sv) | 1988-05-14 |
Family
ID=31099013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16725386U Pending JPS6372373U (sv) | 1986-10-30 | 1986-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6372373U (sv) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001129386A (ja) * | 1999-08-24 | 2001-05-15 | Tokyo Electron Ltd | ガス処理装置およびそれに用いられる集合バルブ |
| US7828016B2 (en) | 1999-08-24 | 2010-11-09 | Tokyo Electron Limited | Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus |
-
1986
- 1986-10-30 JP JP16725386U patent/JPS6372373U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001129386A (ja) * | 1999-08-24 | 2001-05-15 | Tokyo Electron Ltd | ガス処理装置およびそれに用いられる集合バルブ |
| JP4570748B2 (ja) * | 1999-08-24 | 2010-10-27 | 東京エレクトロン株式会社 | ガス処理装置およびそれに用いられる集合バルブ |
| US7828016B2 (en) | 1999-08-24 | 2010-11-09 | Tokyo Electron Limited | Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus |