JPS637163U - - Google Patents

Info

Publication number
JPS637163U
JPS637163U JP10076586U JP10076586U JPS637163U JP S637163 U JPS637163 U JP S637163U JP 10076586 U JP10076586 U JP 10076586U JP 10076586 U JP10076586 U JP 10076586U JP S637163 U JPS637163 U JP S637163U
Authority
JP
Japan
Prior art keywords
exhaust port
film forming
forming apparatus
vacuum chamber
buffle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10076586U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0444613Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10076586U priority Critical patent/JPH0444613Y2/ja
Publication of JPS637163U publication Critical patent/JPS637163U/ja
Application granted granted Critical
Publication of JPH0444613Y2 publication Critical patent/JPH0444613Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP10076586U 1986-06-28 1986-06-28 Expired JPH0444613Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10076586U JPH0444613Y2 (enrdf_load_stackoverflow) 1986-06-28 1986-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10076586U JPH0444613Y2 (enrdf_load_stackoverflow) 1986-06-28 1986-06-28

Publications (2)

Publication Number Publication Date
JPS637163U true JPS637163U (enrdf_load_stackoverflow) 1988-01-18
JPH0444613Y2 JPH0444613Y2 (enrdf_load_stackoverflow) 1992-10-21

Family

ID=30970893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10076586U Expired JPH0444613Y2 (enrdf_load_stackoverflow) 1986-06-28 1986-06-28

Country Status (1)

Country Link
JP (1) JPH0444613Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01294598A (ja) * 1988-05-23 1989-11-28 Sumitomo Electric Ind Ltd 気相成長装置
JPH08958U (ja) * 1995-12-21 1996-06-11 アネルバ株式会社 スパッタリング装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01294598A (ja) * 1988-05-23 1989-11-28 Sumitomo Electric Ind Ltd 気相成長装置
JPH08958U (ja) * 1995-12-21 1996-06-11 アネルバ株式会社 スパッタリング装置

Also Published As

Publication number Publication date
JPH0444613Y2 (enrdf_load_stackoverflow) 1992-10-21

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