JPS637160U - - Google Patents
Info
- Publication number
- JPS637160U JPS637160U JP10101086U JP10101086U JPS637160U JP S637160 U JPS637160 U JP S637160U JP 10101086 U JP10101086 U JP 10101086U JP 10101086 U JP10101086 U JP 10101086U JP S637160 U JPS637160 U JP S637160U
- Authority
- JP
- Japan
- Prior art keywords
- excitation coil
- ion plating
- plating apparatus
- evaporation source
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 claims description 7
- 238000007733 ion plating Methods 0.000 claims description 7
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 6
- 239000012212 insulator Substances 0.000 claims description 2
- 238000009413 insulation Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10101086U JPS637160U (de) | 1986-07-01 | 1986-07-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10101086U JPS637160U (de) | 1986-07-01 | 1986-07-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS637160U true JPS637160U (de) | 1988-01-18 |
Family
ID=30971360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10101086U Pending JPS637160U (de) | 1986-07-01 | 1986-07-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS637160U (de) |
-
1986
- 1986-07-01 JP JP10101086U patent/JPS637160U/ja active Pending