JPH0460555U - - Google Patents
Info
- Publication number
- JPH0460555U JPH0460555U JP10334390U JP10334390U JPH0460555U JP H0460555 U JPH0460555 U JP H0460555U JP 10334390 U JP10334390 U JP 10334390U JP 10334390 U JP10334390 U JP 10334390U JP H0460555 U JPH0460555 U JP H0460555U
- Authority
- JP
- Japan
- Prior art keywords
- gas supply
- supply pipe
- processing apparatus
- plasma processing
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10334390U JPH0460555U (de) | 1990-10-02 | 1990-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10334390U JPH0460555U (de) | 1990-10-02 | 1990-10-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0460555U true JPH0460555U (de) | 1992-05-25 |
Family
ID=31848175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10334390U Pending JPH0460555U (de) | 1990-10-02 | 1990-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0460555U (de) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63124238A (ja) * | 1986-11-13 | 1988-05-27 | Matsushita Electric Ind Co Ltd | 光デイスク |
| JPH01111876A (ja) * | 1987-10-26 | 1989-04-28 | Hitachi Ltd | プラズマ処理による薄膜形成装置 |
| JPH0246857B2 (de) * | 1980-04-14 | 1990-10-17 | Kerunfuorushungusuanraage Yuuritsuhi Gmbh |
-
1990
- 1990-10-02 JP JP10334390U patent/JPH0460555U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0246857B2 (de) * | 1980-04-14 | 1990-10-17 | Kerunfuorushungusuanraage Yuuritsuhi Gmbh | |
| JPS63124238A (ja) * | 1986-11-13 | 1988-05-27 | Matsushita Electric Ind Co Ltd | 光デイスク |
| JPH01111876A (ja) * | 1987-10-26 | 1989-04-28 | Hitachi Ltd | プラズマ処理による薄膜形成装置 |