JPS6371492U - - Google Patents
Info
- Publication number
- JPS6371492U JPS6371492U JP16620086U JP16620086U JPS6371492U JP S6371492 U JPS6371492 U JP S6371492U JP 16620086 U JP16620086 U JP 16620086U JP 16620086 U JP16620086 U JP 16620086U JP S6371492 U JPS6371492 U JP S6371492U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- rotating shaft
- casing
- molecular pump
- turbo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16620086U JPS6371492U (me) | 1986-10-28 | 1986-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16620086U JPS6371492U (me) | 1986-10-28 | 1986-10-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6371492U true JPS6371492U (me) | 1988-05-13 |
Family
ID=31096944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16620086U Pending JPS6371492U (me) | 1986-10-28 | 1986-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6371492U (me) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0246093U (me) * | 1988-09-26 | 1990-03-29 | ||
| WO2005028874A1 (ja) * | 2003-09-16 | 2005-03-31 | Boc Edwards Japan Limited | ロータ軸と回転体との固定構造及び該固定構造を有するターボ分子ポンプ |
| JP2013100827A (ja) * | 2013-02-27 | 2013-05-23 | Osaka Vacuum Ltd | 分子ポンプのロータ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5048512A (me) * | 1973-03-30 | 1975-04-30 |
-
1986
- 1986-10-28 JP JP16620086U patent/JPS6371492U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5048512A (me) * | 1973-03-30 | 1975-04-30 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0246093U (me) * | 1988-09-26 | 1990-03-29 | ||
| WO2005028874A1 (ja) * | 2003-09-16 | 2005-03-31 | Boc Edwards Japan Limited | ロータ軸と回転体との固定構造及び該固定構造を有するターボ分子ポンプ |
| JP2013100827A (ja) * | 2013-02-27 | 2013-05-23 | Osaka Vacuum Ltd | 分子ポンプのロータ |