JPS6370554U - - Google Patents

Info

Publication number
JPS6370554U
JPS6370554U JP16393886U JP16393886U JPS6370554U JP S6370554 U JPS6370554 U JP S6370554U JP 16393886 U JP16393886 U JP 16393886U JP 16393886 U JP16393886 U JP 16393886U JP S6370554 U JPS6370554 U JP S6370554U
Authority
JP
Japan
Prior art keywords
positioning pin
vertical direction
spindle
housing
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16393886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0447720Y2 (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986163938U priority Critical patent/JPH0447720Y2/ja
Publication of JPS6370554U publication Critical patent/JPS6370554U/ja
Application granted granted Critical
Publication of JPH0447720Y2 publication Critical patent/JPH0447720Y2/ja
Expired legal-status Critical Current

Links

JP1986163938U 1986-10-25 1986-10-25 Expired JPH0447720Y2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986163938U JPH0447720Y2 (zh) 1986-10-25 1986-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986163938U JPH0447720Y2 (zh) 1986-10-25 1986-10-25

Publications (2)

Publication Number Publication Date
JPS6370554U true JPS6370554U (zh) 1988-05-12
JPH0447720Y2 JPH0447720Y2 (zh) 1992-11-11

Family

ID=31092600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986163938U Expired JPH0447720Y2 (zh) 1986-10-25 1986-10-25

Country Status (1)

Country Link
JP (1) JPH0447720Y2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010266561A (ja) * 2009-05-13 2010-11-25 Hitachi High-Technologies Corp プロキシミティ露光装置、プロキシミティ露光装置のマスクの位置ずれ防止方法、及び表示用パネル基板の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS562703A (en) * 1979-06-21 1981-01-13 Matsushita Electric Ind Co Ltd Waterproof method for waveguide of parabolic antenna

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS562703A (en) * 1979-06-21 1981-01-13 Matsushita Electric Ind Co Ltd Waterproof method for waveguide of parabolic antenna

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010266561A (ja) * 2009-05-13 2010-11-25 Hitachi High-Technologies Corp プロキシミティ露光装置、プロキシミティ露光装置のマスクの位置ずれ防止方法、及び表示用パネル基板の製造方法

Also Published As

Publication number Publication date
JPH0447720Y2 (zh) 1992-11-11

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