JPS6370554U - - Google Patents
Info
- Publication number
- JPS6370554U JPS6370554U JP16393886U JP16393886U JPS6370554U JP S6370554 U JPS6370554 U JP S6370554U JP 16393886 U JP16393886 U JP 16393886U JP 16393886 U JP16393886 U JP 16393886U JP S6370554 U JPS6370554 U JP S6370554U
- Authority
- JP
- Japan
- Prior art keywords
- positioning pin
- vertical direction
- spindle
- housing
- actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986163938U JPH0447720Y2 (it) | 1986-10-25 | 1986-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986163938U JPH0447720Y2 (it) | 1986-10-25 | 1986-10-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6370554U true JPS6370554U (it) | 1988-05-12 |
| JPH0447720Y2 JPH0447720Y2 (it) | 1992-11-11 |
Family
ID=31092600
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986163938U Expired JPH0447720Y2 (it) | 1986-10-25 | 1986-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0447720Y2 (it) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010266561A (ja) * | 2009-05-13 | 2010-11-25 | Hitachi High-Technologies Corp | プロキシミティ露光装置、プロキシミティ露光装置のマスクの位置ずれ防止方法、及び表示用パネル基板の製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS562703A (en) * | 1979-06-21 | 1981-01-13 | Matsushita Electric Ind Co Ltd | Waterproof method for waveguide of parabolic antenna |
-
1986
- 1986-10-25 JP JP1986163938U patent/JPH0447720Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS562703A (en) * | 1979-06-21 | 1981-01-13 | Matsushita Electric Ind Co Ltd | Waterproof method for waveguide of parabolic antenna |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010266561A (ja) * | 2009-05-13 | 2010-11-25 | Hitachi High-Technologies Corp | プロキシミティ露光装置、プロキシミティ露光装置のマスクの位置ずれ防止方法、及び表示用パネル基板の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0447720Y2 (it) | 1992-11-11 |