JPS6370144U - - Google Patents

Info

Publication number
JPS6370144U
JPS6370144U JP16437886U JP16437886U JPS6370144U JP S6370144 U JPS6370144 U JP S6370144U JP 16437886 U JP16437886 U JP 16437886U JP 16437886 U JP16437886 U JP 16437886U JP S6370144 U JPS6370144 U JP S6370144U
Authority
JP
Japan
Prior art keywords
turntable
suctioning
surround
wall surface
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16437886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH039328Y2 (US06521211-20030218-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16437886U priority Critical patent/JPH039328Y2/ja
Publication of JPS6370144U publication Critical patent/JPS6370144U/ja
Application granted granted Critical
Publication of JPH039328Y2 publication Critical patent/JPH039328Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP16437886U 1986-10-27 1986-10-27 Expired JPH039328Y2 (US06521211-20030218-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16437886U JPH039328Y2 (US06521211-20030218-C00004.png) 1986-10-27 1986-10-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16437886U JPH039328Y2 (US06521211-20030218-C00004.png) 1986-10-27 1986-10-27

Publications (2)

Publication Number Publication Date
JPS6370144U true JPS6370144U (US06521211-20030218-C00004.png) 1988-05-11
JPH039328Y2 JPH039328Y2 (US06521211-20030218-C00004.png) 1991-03-08

Family

ID=31093445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16437886U Expired JPH039328Y2 (US06521211-20030218-C00004.png) 1986-10-27 1986-10-27

Country Status (1)

Country Link
JP (1) JPH039328Y2 (US06521211-20030218-C00004.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0278551A (ja) * 1988-09-16 1990-03-19 Dainippon Printing Co Ltd 印刷機部品用洗浄装置
JPH11102884A (ja) * 1997-09-29 1999-04-13 Dainippon Screen Mfg Co Ltd 基板処理装置および周辺部材の洗浄方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0278551A (ja) * 1988-09-16 1990-03-19 Dainippon Printing Co Ltd 印刷機部品用洗浄装置
JPH11102884A (ja) * 1997-09-29 1999-04-13 Dainippon Screen Mfg Co Ltd 基板処理装置および周辺部材の洗浄方法

Also Published As

Publication number Publication date
JPH039328Y2 (US06521211-20030218-C00004.png) 1991-03-08

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