JPS6368126U - - Google Patents
Info
- Publication number
- JPS6368126U JPS6368126U JP16214486U JP16214486U JPS6368126U JP S6368126 U JPS6368126 U JP S6368126U JP 16214486 U JP16214486 U JP 16214486U JP 16214486 U JP16214486 U JP 16214486U JP S6368126 U JPS6368126 U JP S6368126U
- Authority
- JP
- Japan
- Prior art keywords
- spin
- inert gas
- container
- manufacturing apparatus
- type optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011261 inert gas Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16214486U JPS6368126U (enExample) | 1986-10-21 | 1986-10-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16214486U JPS6368126U (enExample) | 1986-10-21 | 1986-10-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6368126U true JPS6368126U (enExample) | 1988-05-09 |
Family
ID=31089128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16214486U Pending JPS6368126U (enExample) | 1986-10-21 | 1986-10-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6368126U (enExample) |
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1986
- 1986-10-21 JP JP16214486U patent/JPS6368126U/ja active Pending