JPS6367505U - - Google Patents
Info
- Publication number
- JPS6367505U JPS6367505U JP16338786U JP16338786U JPS6367505U JP S6367505 U JPS6367505 U JP S6367505U JP 16338786 U JP16338786 U JP 16338786U JP 16338786 U JP16338786 U JP 16338786U JP S6367505 U JPS6367505 U JP S6367505U
- Authority
- JP
- Japan
- Prior art keywords
- cleanliness
- clean room
- main body
- high degree
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 claims description 3
- 230000003749 cleanliness Effects 0.000 claims 5
Landscapes
- Warehouses Or Storage Devices (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16338786U JPH0249204Y2 (da) | 1986-10-23 | 1986-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16338786U JPH0249204Y2 (da) | 1986-10-23 | 1986-10-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6367505U true JPS6367505U (da) | 1988-05-07 |
| JPH0249204Y2 JPH0249204Y2 (da) | 1990-12-25 |
Family
ID=31091537
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16338786U Expired JPH0249204Y2 (da) | 1986-10-23 | 1986-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249204Y2 (da) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03172203A (ja) * | 1989-11-30 | 1991-07-25 | Daifuku Co Ltd | 荷保管設備 |
| JP2009012965A (ja) * | 2007-07-09 | 2009-01-22 | Asyst Technologies Japan Inc | ストッカ装置 |
-
1986
- 1986-10-23 JP JP16338786U patent/JPH0249204Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03172203A (ja) * | 1989-11-30 | 1991-07-25 | Daifuku Co Ltd | 荷保管設備 |
| JP2009012965A (ja) * | 2007-07-09 | 2009-01-22 | Asyst Technologies Japan Inc | ストッカ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0249204Y2 (da) | 1990-12-25 |