JPS636725U - - Google Patents

Info

Publication number
JPS636725U
JPS636725U JP10126586U JP10126586U JPS636725U JP S636725 U JPS636725 U JP S636725U JP 10126586 U JP10126586 U JP 10126586U JP 10126586 U JP10126586 U JP 10126586U JP S636725 U JPS636725 U JP S636725U
Authority
JP
Japan
Prior art keywords
vapor phase
frequency oscillation
phase growth
oscillation coil
susceptor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10126586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10126586U priority Critical patent/JPS636725U/ja
Publication of JPS636725U publication Critical patent/JPS636725U/ja
Pending legal-status Critical Current

Links

Landscapes

  • General Induction Heating (AREA)
JP10126586U 1986-07-01 1986-07-01 Pending JPS636725U (is)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10126586U JPS636725U (is) 1986-07-01 1986-07-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10126586U JPS636725U (is) 1986-07-01 1986-07-01

Publications (1)

Publication Number Publication Date
JPS636725U true JPS636725U (is) 1988-01-18

Family

ID=30971852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10126586U Pending JPS636725U (is) 1986-07-01 1986-07-01

Country Status (1)

Country Link
JP (1) JPS636725U (is)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6136924A (ja) * 1984-07-19 1986-02-21 エルピーイー・ソチエタ・ペル・アチオニ エピタキシー反応器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6136924A (ja) * 1984-07-19 1986-02-21 エルピーイー・ソチエタ・ペル・アチオニ エピタキシー反応器

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