JPH0341927U - - Google Patents
Info
- Publication number
- JPH0341927U JPH0341927U JP10245389U JP10245389U JPH0341927U JP H0341927 U JPH0341927 U JP H0341927U JP 10245389 U JP10245389 U JP 10245389U JP 10245389 U JP10245389 U JP 10245389U JP H0341927 U JPH0341927 U JP H0341927U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- boat
- inner lid
- gas outlet
- protrusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Muffle Furnaces And Rotary Kilns (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10245389U JPH0341927U (is) | 1989-08-31 | 1989-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10245389U JPH0341927U (is) | 1989-08-31 | 1989-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0341927U true JPH0341927U (is) | 1991-04-22 |
Family
ID=31651349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10245389U Pending JPH0341927U (is) | 1989-08-31 | 1989-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0341927U (is) |
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1989
- 1989-08-31 JP JP10245389U patent/JPH0341927U/ja active Pending