JPH0377435U - - Google Patents
Info
- Publication number
- JPH0377435U JPH0377435U JP13898689U JP13898689U JPH0377435U JP H0377435 U JPH0377435 U JP H0377435U JP 13898689 U JP13898689 U JP 13898689U JP 13898689 U JP13898689 U JP 13898689U JP H0377435 U JPH0377435 U JP H0377435U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- boat
- operating rod
- core tube
- furnace core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000005192 partition Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13898689U JPH0377435U (is) | 1989-11-30 | 1989-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13898689U JPH0377435U (is) | 1989-11-30 | 1989-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0377435U true JPH0377435U (is) | 1991-08-05 |
Family
ID=31686059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13898689U Pending JPH0377435U (is) | 1989-11-30 | 1989-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0377435U (is) |
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1989
- 1989-11-30 JP JP13898689U patent/JPH0377435U/ja active Pending