JPS6367065U - - Google Patents
Info
- Publication number
- JPS6367065U JPS6367065U JP1986162646U JP16264686U JPS6367065U JP S6367065 U JPS6367065 U JP S6367065U JP 1986162646 U JP1986162646 U JP 1986162646U JP 16264686 U JP16264686 U JP 16264686U JP S6367065 U JPS6367065 U JP S6367065U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- magnet
- wafer
- surface plate
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 4
- 239000003302 ferromagnetic material Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986162646U JPS6367065U (de) | 1986-10-22 | 1986-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986162646U JPS6367065U (de) | 1986-10-22 | 1986-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6367065U true JPS6367065U (de) | 1988-05-06 |
Family
ID=31090108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986162646U Pending JPS6367065U (de) | 1986-10-22 | 1986-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6367065U (de) |
-
1986
- 1986-10-22 JP JP1986162646U patent/JPS6367065U/ja active Pending