JPS6366796U - - Google Patents

Info

Publication number
JPS6366796U
JPS6366796U JP16091186U JP16091186U JPS6366796U JP S6366796 U JPS6366796 U JP S6366796U JP 16091186 U JP16091186 U JP 16091186U JP 16091186 U JP16091186 U JP 16091186U JP S6366796 U JPS6366796 U JP S6366796U
Authority
JP
Japan
Prior art keywords
air
stage
rare gas
gas recovery
components
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16091186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16091186U priority Critical patent/JPS6366796U/ja
Publication of JPS6366796U publication Critical patent/JPS6366796U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Separation By Low-Temperature Treatments (AREA)
JP16091186U 1986-10-22 1986-10-22 Pending JPS6366796U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16091186U JPS6366796U (enExample) 1986-10-22 1986-10-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16091186U JPS6366796U (enExample) 1986-10-22 1986-10-22

Publications (1)

Publication Number Publication Date
JPS6366796U true JPS6366796U (enExample) 1988-05-06

Family

ID=31086739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16091186U Pending JPS6366796U (enExample) 1986-10-22 1986-10-22

Country Status (1)

Country Link
JP (1) JPS6366796U (enExample)

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