JPS6365901A - Evaporation of corrosive solution and evaporator - Google Patents
Evaporation of corrosive solution and evaporatorInfo
- Publication number
- JPS6365901A JPS6365901A JP21089786A JP21089786A JPS6365901A JP S6365901 A JPS6365901 A JP S6365901A JP 21089786 A JP21089786 A JP 21089786A JP 21089786 A JP21089786 A JP 21089786A JP S6365901 A JPS6365901 A JP S6365901A
- Authority
- JP
- Japan
- Prior art keywords
- evaporator
- solution
- liquid
- heating section
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001704 evaporation Methods 0.000 title claims description 9
- 230000008020 evaporation Effects 0.000 title 1
- 239000007788 liquid Substances 0.000 claims abstract description 45
- 238000010438 heat treatment Methods 0.000 claims abstract description 33
- 238000005192 partition Methods 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 2
- 239000006193 liquid solution Substances 0.000 claims 1
- 239000002927 high level radioactive waste Substances 0.000 abstract description 14
- 239000002184 metal Substances 0.000 abstract description 11
- 229910052751 metal Inorganic materials 0.000 abstract description 11
- 230000005855 radiation Effects 0.000 abstract description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 5
- 238000004508 fractional distillation Methods 0.000 abstract 1
- 238000012423 maintenance Methods 0.000 description 10
- 230000007797 corrosion Effects 0.000 description 8
- 238000005260 corrosion Methods 0.000 description 8
- 239000003758 nuclear fuel Substances 0.000 description 4
- 238000012958 reprocessing Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000004992 fission Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 231100000989 no adverse effect Toxicity 0.000 description 1
- 239000010887 waste solvent Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、腐食性溶液の蒸発方法および蒸発缶に係り、
特に、原子燃料再処理施設のように、高放射線環境下で
使用する等の理由で、メンテナンスフリーで、かつ長寿
命であることが要求される蒸発缶の加熱方法および装置
に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for evaporating a corrosive solution and an evaporator;
In particular, the present invention relates to a heating method and apparatus for an evaporator, which is required to be maintenance-free and have a long service life because it is used in a high radiation environment such as in a nuclear fuel reprocessing facility.
従来の装置は、特開昭58−36601 号に記載のよ
うに、蒸発缶加熱部の缶液に伝熱管を浸すインナーチュ
ーブタイプか、蒸発缶加熱部をジャケットで覆い、ジャ
ケット内に加熱流体を流すジャケットタイプであった。Conventional devices are of the inner tube type, in which the heat transfer tube is immersed in the liquid in the heating section of the evaporator, as described in JP-A No. 58-36601, or the heating section of the evaporator is covered with a jacket, and the heated fluid is poured into the jacket. It was a jacket type that could be worn.
これらはいずれも金属製伝熱面を介して缶液を加熱する
ため、缶液が腐食性流体である場合、伝熱面は厳しい腐
食条件下におかれていた。また、金属製伝熱面を介して
缶液を加熱するので、伝熱面にスケールが付着しやすく
、付着したスケールが伝熱効率を著しく低下させること
から、スケール除去のメンテナンスが必要であった。Since all of these heat the can liquid through a metal heat transfer surface, if the can liquid is a corrosive fluid, the heat transfer surface is subjected to severe corrosive conditions. In addition, since the can liquid is heated through a metal heat transfer surface, scale easily adheres to the heat transfer surface, and the attached scale significantly reduces heat transfer efficiency, requiring maintenance to remove scale.
上記従来技術は、メンテナンスフリー化および長寿命化
の点についての配慮がなかった。特に、原子燃料再処理
施設の高レベル廃液蒸発缶のように、高放射線等の厳し
い環境下で使用される場合は、メンテナンスが困難であ
り、高い信頼性が要求されるので、耐食性の点でもメン
テナンス性の点でも不十分な蒸発缶しか得られなかった
。The above-mentioned conventional technology does not give consideration to maintenance-free design and long life. In particular, when used in harsh environments such as high radiation, such as high-level waste liquid evaporators in nuclear fuel reprocessing facilities, maintenance is difficult and high reliability is required, so corrosion resistance is also important. The result was an evaporator that was insufficient in terms of maintainability.
本発明の目的は、腐食条件およびスケール付着の面で最
も問題の多い金属製伝熱面を用いない腐食性溶液蒸発方
法および蒸発缶を提供することである。It is an object of the present invention to provide a method and an evaporator for evaporating corrosive solutions that do not use metal heat transfer surfaces, which are most problematic in terms of corrosive conditions and scaling.
本発明は、上記目的を達成するために、腐食性溶液を非
接触かつ遠隔的に加熱する方法を提案するものである。In order to achieve the above object, the present invention proposes a method of heating a corrosive solution non-contact and remotely.
加熱は、蒸発缶の溶液面より上に設けた窓を通して、レ
ーザ光またはマイクロ波等を照射することによりなされ
る。Heating is performed by irradiating laser light, microwaves, or the like through a window provided above the solution surface of the evaporator.
レーザ光の場合、レーザ発振源を保護するためには1発
振源と蒸発缶との間に反射鏡等の光学系を介在させ、両
者を離すことが望ましい。In the case of laser light, in order to protect the laser oscillation source, it is desirable to interpose an optical system such as a reflector between the oscillation source and the evaporator to separate the two.
また、溶液が透明のときは、レーザ光の吸収率を高める
ために、溶液中でレーザ光を複数回往復させる反射板を
溶液中に設けてもよい。Further, when the solution is transparent, a reflecting plate may be provided in the solution to cause the laser beam to reciprocate multiple times in the solution in order to increase the absorption rate of the laser beam.
さらに、蒸発缶加熱部の缶壁内部に沿って仕切板を設け
、加熱部缶壁と仕切板との間に外部からの未加熱溶液を
供給する缶液導入管を開口させ、缶壁自体を保護するこ
ともできる。Furthermore, a partition plate is provided along the inside of the can wall of the evaporator heating section, and a can liquid inlet pipe for supplying unheated solution from the outside is opened between the heating section can wall and the partition plate, and the can wall itself is It can also be protected.
レーザ発振器は、可視から赤外のレーザ光を出射する。 The laser oscillator emits visible to infrared laser light.
出射されたレーザ光は、蒸発缶加熱部の缶液と接触しな
い部分に設けた窓から蒸発缶内へ入射し、缶液を加熱す
る。The emitted laser beam enters the evaporator through a window provided in a portion of the evaporator heating section that does not come into contact with the can liquid, and heats the can liquid.
この方法では、金属伝熱面を介することなく、直接加熱
するので、高温の腐食性缶液と接触し、厳しい腐食条件
下におかれる金m製伝熱面をなくすことができる。In this method, since heating is performed directly without passing through the metal heat transfer surface, it is possible to eliminate the gold heat transfer surface that comes into contact with the high temperature corrosive tank liquid and is subjected to severe corrosive conditions.
また、金属製伝熱面を介して缶液を加熱する場合、缶液
成分の析出や缶液中の不溶解成分の付着等に起因して伝
熱面にスケールが付着し、これを除去するメンテナンス
が必要であったが、金/[伝熱面全体がなくなり、スケ
ール除去が不要となる。In addition, when heating the can liquid through a metal heat transfer surface, scale adheres to the heat transfer surface due to precipitation of can liquid components or adhesion of undissolved components in the can liquid, which must be removed. Maintenance was required, but the entire gold/[heat transfer surface is gone, and scale removal is no longer necessary.
さらに、蒸発缶とレーザ発振器との間に反射鏡を設置す
ると1本発明による腐食性溶液蒸発缶の構成要素のうち
、最もメンテナンスが必要だと考えられるレーザ発振器
を蒸発缶本体から離し、メンテナンスの容易な場所に配
置できる。Furthermore, by installing a reflector between the evaporator and the laser oscillator, the laser oscillator, which is considered to require the most maintenance among the components of the corrosive solution evaporator according to the present invention, can be separated from the evaporator body, making maintenance easier. Can be placed in an easy location.
なお、マイクロ波加熱の場合は1発振器と蒸発缶の窓と
の間は、導波管により接続する。In the case of microwave heating, a waveguide is used to connect the first oscillator and the window of the evaporator.
溶液が透明の場合は、レーザ光を複数回往復させる反射
板を溶液中に設置すると、効率が上がる。If the solution is transparent, installing a reflector in the solution that causes the laser beam to reciprocate multiple times will increase efficiency.
蒸発缶の缶壁内部に沿って仕切り板を設け1缶壁と仕切
板との間から溶液を供給すると、缶壁が比較的低温に保
たれ、保護される。この場合、仕切板に多少のスケール
が付潰し、またはピンホール等が生じても、缶壁自体で
はないので、外部への悪影響はない。By providing a partition plate along the inside of the can wall of the evaporator and supplying the solution from between the can wall and the partition plate, the can wall is kept at a relatively low temperature and protected. In this case, even if some scale is crushed or pinholes are formed on the partition plate, there is no adverse effect on the outside because it is not the can wall itself.
次に、本発明の一実施例を1本発明を原子燃料再処理施
設の高レベル廃液蒸発缶に適用した場合を例にとり、第
1図を用いて説明する。Next, an embodiment of the present invention will be described with reference to FIG. 1, taking as an example a case in which the present invention is applied to a high-level waste liquid evaporator of a nuclear fuel reprocessing facility.
加熱部1と分留塔2とからなるケトル式高レベル廃液蒸
発缶において、加熱部上部の缶液と接触しない部分に、
透明度が高くエネルギー吸収の少ない石英ガラス製の窓
4を設ける。この、14からレーザ光を缶内に入射させ
るように1反射鏡5とEDLレーザ発振器3を配置する
。EDLレーザ発振器3は、通常使用時には高レベル廃
液蒸発缶内の高レベル廃液からの一次放射線を避け、メ
ンテナンス時には遮W1扉6により高レベル蒸発缶を設
置したセル8と隔離できるレーザ発1,1器用セルフに
112置する。In a kettle-type high-level waste liquid evaporator consisting of a heating section 1 and a fractionator 2, a portion above the heating section that does not come into contact with the bottom liquid is
A window 4 made of quartz glass with high transparency and low energy absorption is provided. The 1 reflecting mirror 5 and the EDL laser oscillator 3 are arranged so that the laser beam enters into the can from this 14. The EDL laser oscillator 3 avoids primary radiation from the high-level waste liquid in the high-level waste liquid evaporator during normal use, and can be isolated from the cell 8 in which the high-level evaporator is installed by a shield W1 door 6 during maintenance. Place 112 on the dexterity self.
上記構成の本実施例は、以下のごとく動作する。This embodiment with the above configuration operates as follows.
缶液である高レベル廃液は、EDLレーザ発振器3から
出射され、反射!!5で方向を変え、石英ガラス窓4か
ら缶内に入射するレーザ光により、金属製伝熱面を介す
ることなく、非接触で直接加熱される。High-level waste liquid, which is can liquid, is emitted from the EDL laser oscillator 3 and reflected! ! The direction is changed at 5, and the laser beam enters the inside of the can through the quartz glass window 4, and the can is heated directly without contact, without passing through a metal heat transfer surface.
EDLレーザ発振器3は、反射鏡5を用いて、牧射線量
率の高い高レベル廃液蒸発缶と分離してレーザ発振器用
セルフに設置し、通常使用時に耐放射線性の低い光学系
や電子回路に一次放射線が黒射されないようにする。さ
らに、EDLレーザ発振器3のメンテナンス時には、遮
蔽扉6を閉めて、レーザ発振器用セルフを高レベル廃液
蒸発缶の設置されたセル8と隔離して放射線を遮断し。The EDL laser oscillator 3 is installed in the laser oscillator self, using a reflector 5, and separated from the high-level waste liquid evaporator with a high radiation dose rate, and is installed in the laser oscillator self-container using a reflector 5. Prevent primary radiation from being emitted. Furthermore, during maintenance of the EDL laser oscillator 3, the shielding door 6 is closed to isolate the laser oscillator self from the cell 8 in which the high-level waste liquid evaporator is installed, thereby blocking radiation.
メンテナンス時の安全性を高めている。Improves safety during maintenance.
本実施例の場合、缶液である高レベル廃液は、多量の核
分裂生成分や廃溶媒を含んでいるため透明度が低く、レ
ーザ光のエネルギーが効率よく缶液に吸収されるが、缶
液の透明度が高い場合、第2図に示すように、缶液の中
に反射板11を設け。In the case of this example, the high-level waste liquid, which is the can liquid, has low transparency because it contains a large amount of fission products and waste solvent, and the energy of the laser beam is efficiently absorbed by the can liquid. When the transparency is high, as shown in FIG. 2, a reflective plate 11 is provided in the can liquid.
レーザ光を缶液中で往復させ、缶液にエネルギーを吸収
させて加熱する。Laser light is sent back and forth within the can liquid, causing the can liquid to absorb energy and heat it.
さらに、蒸発缶加熱部の接液部温度を低く抑える機能を
持たせた実施例を、第3図を用いて説明する。Furthermore, an embodiment in which the temperature of the liquid-contacted part of the evaporator heating section is kept low will be described with reference to FIG.
第3図において、缶液である高レベル廃液は、缶液導入
管12により加熱部内側に設けた仕切板13と加熱部缶
壁の間に導入され、仕切板13と缶壁の間を流れて、仕
切板中央の缶液導入口から缶内へ流入する。EDLレー
ザ発振器3からのレーザ光により加熱された缶液は、仕
切板13および外部から連続的に供給され仕切板と缶壁
との間を流れる比較的低温の高レベル廃液によって、蒸
発缶加熱部の缶壁から離されて直接接触しないので、缶
壁の温度は外部から供給される高レベル廃液の温度とほ
ぼ同じに保たれる。したがって、蒸発缶加熱部缶壁の腐
食条件が緩和され、蒸発缶の長寿命化に寄与する。一方
、仕切板13は、高温の缶液と接触し、厳しい腐食条件
下に置かれるが。In FIG. 3, high-level waste liquid, which is can liquid, is introduced between a partition plate 13 provided inside the heating section and the heating section can wall through a can liquid introduction pipe 12, and flows between the partition plate 13 and the can wall. Then, the liquid flows into the can from the can liquid inlet in the center of the partition plate. The can liquid heated by the laser beam from the EDL laser oscillator 3 is heated by the relatively low-temperature high-level waste liquid that is continuously supplied from the partition plate 13 and the outside and flows between the partition plate and the can wall, to the evaporator heating section. The temperature of the can wall remains approximately the same as the temperature of the externally supplied high-level effluent. Therefore, the corrosion conditions on the wall of the evaporator heating section are alleviated, contributing to extending the life of the evaporator. On the other hand, the partition plate 13 comes into contact with the high-temperature tank liquid and is placed under severe corrosive conditions.
缶壁を内包する一次隔壁ではないから、腐食により万一
ビンホール等の欠陥を生じても、蒸発缶自体の機能には
支障をきたさない。Since it is not a primary partition that encloses the can wall, even if defects such as bottle holes occur due to corrosion, the function of the evaporator itself will not be affected.
以上の実施例においては、加熱源としてレーザ光を用い
たが、マイクロ波を加熱源とすることもできる。その場
合、前記反射鏡5に替えて、導波管を用いるのはいうま
でもない。In the above embodiments, laser light was used as the heating source, but microwaves may also be used as the heating source. In that case, it goes without saying that a waveguide may be used in place of the reflecting mirror 5.
本発明によれば、金属製伝熱面を介することなく、腐食
性溶液を直接加熱可能となり、高温で腐食性溶液と接触
し、厳しい腐食条件下に置かれ、従来型の蒸発缶で最も
腐食が激しかった金属製伝熱面自体をなくせるので、腐
食性溶液蒸発缶自体を長寿命化、メンテナンスフリー化
できる。According to the present invention, it is possible to directly heat a corrosive solution without going through a metal heat transfer surface. Since the metal heat transfer surface itself, which was subject to severe corrosion, can be eliminated, the life of the corrosive solution evaporator itself can be extended and maintenance-free.
具体的には、硝酸濃度9.0〜9.5N、圧力155〜
170Torr、温度70〜75℃で減圧蒸発させた場
合、5US304Llの伝熱面の腐食速度は0.02〜
0.05m++*/年、同じく浸漬面の腐食速度は0.
01〜0.041!l/年である。本発明により、5U
S304L製の蒸発缶を製作した場合、伝熱面がないか
ら、蒸発缶の腐食による寿命は、加熱部接液部(浸漬面
)の腐食速度で決まり、従来の金属伝熱面を有する場合
と比較して、1.2〜2倍長くなる。Specifically, the nitric acid concentration is 9.0 to 9.5N, the pressure is 155 to
When evaporating under reduced pressure at 170 Torr and a temperature of 70-75℃, the corrosion rate of the heat transfer surface of 5US304Ll is 0.02~
0.05m++*/year, and the corrosion rate of the immersed surface is 0.
01~0.041! l/year. According to the present invention, 5U
When manufacturing an evaporator made of S304L, there is no heat transfer surface, so the life of the evaporator due to corrosion is determined by the corrosion rate of the heated part (immersed surface), and it is different from a case with a conventional metal heat transfer surface. In comparison, it is 1.2 to 2 times longer.
また、缶液成分の析出や缶液中の不溶解成分の付着等に
起因する金属伝熱面へのスケールの付着が発生しない、
その結果、伝熱効率を低下させるスケール除去のための
メンテナンスが不要となり、メンテナンスフリー化でき
る。In addition, scale adhesion to the metal heat transfer surface due to precipitation of can liquid components or adhesion of undissolved components in the can liquid does not occur.
As a result, there is no need for maintenance to remove scale that reduces heat transfer efficiency, making it maintenance-free.
さらに、蒸発缶とレーザ発振器とを分離して設置できる
ことから、レーザ発振器のメンテナンスが容易で、使用
環境のよい場所にレーザ発振器を設置して、蒸発缶本体
がメンテナンスフリー化されたメリットを充分に生かす
ことができる。Furthermore, since the evaporator and laser oscillator can be installed separately, maintenance of the laser oscillator is easy, and the laser oscillator can be installed in a location with a good usage environment, making it possible to fully enjoy the benefits of making the evaporator main body maintenance-free. You can make use of it.
第1図は本発明を原子燃料再処理施設の高レベル廃液蒸
発缶に適用した一実施例の縦断面図、第2図は缶液の透
明度が高い場合の缶液中にレーザ光反射板を設けた実施
例の縦断面図、第3図は蒸発缶加熱部の缶壁に沿って仕
切り板を設は缶壁と仕切り板との間に外部から溶液を供
給する実施例の縦断面図である。
1・・・蒸発缶加熱部、2・・・蒸発缶分留塔、3・・
・EDLレーザ発振器、4・・・石英ガラス窓、5・・
・反射鏡。
6・・・遮蔽扉、7・・・レーザ発振器用セル、8・・
・高レベル廃液蒸発缶設置用セル、9・・・気水分離器
、10・・・バルブキャップトレイ、11・・・レーザ
光反射板、12・・・缶液導入管、13・・・仕切板。Fig. 1 is a longitudinal cross-sectional view of an embodiment in which the present invention is applied to a high-level waste liquid evaporator in a nuclear fuel reprocessing facility, and Fig. 2 shows a laser beam reflector plate installed in the liquid in the liquid when the liquid is highly transparent. Fig. 3 is a longitudinal sectional view of an embodiment in which a partition plate is provided along the can wall of the evaporator heating section, and a solution is supplied from the outside between the can wall and the partition plate. be. 1... Evaporator heating section, 2... Evaporator fractionator, 3...
・EDL laser oscillator, 4...quartz glass window, 5...
·Reflector. 6... Shielding door, 7... Laser oscillator cell, 8...
・High-level waste liquid evaporator installation cell, 9... Steam water separator, 10... Valve cap tray, 11... Laser light reflector, 12... Bottle liquid inlet pipe, 13... Partition Board.
Claims (1)
液を蒸発させる方法において、前記腐食性溶液を非接触
かつ遠隔的に加熱することを特徴とする腐食性溶液蒸発
方法。 2、特許請求の範囲第1項において、前記加熱がレーザ
光によりなされることを特徴とする腐食性溶液蒸発方法
。 3、特許請求の範囲第1項において、前記加熱がマイク
ロ波によりなされることを特徴とする腐食性溶液蒸発方
法。 4、腐食性溶液を入れて加熱蒸発させる加熱部と蒸発し
た蒸気を分留する分留塔とからなる腐食性溶液蒸発缶に
おいて、前記加熱部上部の前記溶液と接触しない部分に
窓を設け、前記窓から前記溶液にレーザ光を照射し加熱
するレーザ発振器を備えたことを特徴とする腐食性溶液
蒸発缶。 5、特許請求の範囲第4項において、前記レーザ発振器
と前記窓との間に、反射鏡等の光学系を設けたことを特
徴とする腐食性溶液蒸発缶。 6、特許請求の範囲第4項または第5項において、前記
溶液に入射したレーザ光を反射する反射板を前記溶液中
に設けたことを特徴とする腐食性溶液蒸発缶。 7、特許請求の範囲第4項〜第6項のいずれか一項にお
いて、前記加熱部の缶壁内部に沿つて仕切板を設け、前
記加熱部缶壁と前記仕切板との間に前記溶液を外部から
供給する缶液導入管を開口させたことを特徴とする腐食
性溶液蒸発缶。[Claims] 1. A method for evaporating a corrosive solution contained in an evaporator comprising a heating section and a fractionating column, characterized in that the corrosive solution is heated non-contact and remotely. liquid solution evaporation method. 2. The corrosive solution evaporation method according to claim 1, wherein the heating is performed by laser light. 3. The method for evaporating a corrosive solution according to claim 1, wherein the heating is performed by microwaves. 4. In a corrosive solution evaporator consisting of a heating section for heating and evaporating a corrosive solution and a fractionating column for fractionating the evaporated vapor, a window is provided in a part of the upper part of the heating section that does not come into contact with the solution; A corrosive solution evaporator comprising a laser oscillator that irradiates the solution with a laser beam through the window to heat the solution. 5. The corrosive solution evaporator according to claim 4, characterized in that an optical system such as a reflecting mirror is provided between the laser oscillator and the window. 6. A corrosive solution evaporator according to claim 4 or 5, characterized in that a reflecting plate is provided in the solution to reflect a laser beam incident on the solution. 7. In any one of claims 4 to 6, a partition plate is provided along the inside of the can wall of the heating section, and the solution is disposed between the heating section can wall and the partition plate. A corrosive solution evaporator characterized in that a can liquid introduction pipe for supplying from the outside is opened.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61210897A JPH0685841B2 (en) | 1986-09-08 | 1986-09-08 | Corrosive solution evaporator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61210897A JPH0685841B2 (en) | 1986-09-08 | 1986-09-08 | Corrosive solution evaporator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6365901A true JPS6365901A (en) | 1988-03-24 |
JPH0685841B2 JPH0685841B2 (en) | 1994-11-02 |
Family
ID=16596888
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61210897A Expired - Lifetime JPH0685841B2 (en) | 1986-09-08 | 1986-09-08 | Corrosive solution evaporator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0685841B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4913790A (en) * | 1988-03-25 | 1990-04-03 | Tokyo Electron Limited | Treating method |
GB2492363A (en) * | 2011-06-29 | 2013-01-02 | Robert Simpson | Laser Kettle Liquid Heating Appliance |
CN115155077A (en) * | 2022-07-04 | 2022-10-11 | 枣庄学院 | Multi-component liquid micro-evaporation device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6034241B2 (en) * | 2013-05-21 | 2016-11-30 | 日立Geニュークリア・エナジー株式会社 | Evaporator |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6249901A (en) * | 1985-08-28 | 1987-03-04 | Toshiba Corp | Vacuum distillation equipment |
JPS6239803U (en) * | 1985-08-28 | 1987-03-10 |
-
1986
- 1986-09-08 JP JP61210897A patent/JPH0685841B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6249901A (en) * | 1985-08-28 | 1987-03-04 | Toshiba Corp | Vacuum distillation equipment |
JPS6239803U (en) * | 1985-08-28 | 1987-03-10 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4913790A (en) * | 1988-03-25 | 1990-04-03 | Tokyo Electron Limited | Treating method |
GB2492363A (en) * | 2011-06-29 | 2013-01-02 | Robert Simpson | Laser Kettle Liquid Heating Appliance |
CN115155077A (en) * | 2022-07-04 | 2022-10-11 | 枣庄学院 | Multi-component liquid micro-evaporation device |
CN115155077B (en) * | 2022-07-04 | 2023-08-18 | 枣庄学院 | Multi-component liquid micro-evaporation device |
Also Published As
Publication number | Publication date |
---|---|
JPH0685841B2 (en) | 1994-11-02 |
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