JPS6365754B2 - - Google Patents

Info

Publication number
JPS6365754B2
JPS6365754B2 JP58193345A JP19334583A JPS6365754B2 JP S6365754 B2 JPS6365754 B2 JP S6365754B2 JP 58193345 A JP58193345 A JP 58193345A JP 19334583 A JP19334583 A JP 19334583A JP S6365754 B2 JPS6365754 B2 JP S6365754B2
Authority
JP
Japan
Prior art keywords
substrate
sputtering
electrodes
sputter
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58193345A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6086272A (ja
Inventor
Naokichi Hosokawa
Shiro Fukushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Canon Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corp filed Critical Canon Anelva Corp
Priority to JP19334583A priority Critical patent/JPS6086272A/ja
Publication of JPS6086272A publication Critical patent/JPS6086272A/ja
Publication of JPS6365754B2 publication Critical patent/JPS6365754B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H01J37/3408—Planar magnetron sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP19334583A 1983-10-18 1983-10-18 スパツタ装置 Granted JPS6086272A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19334583A JPS6086272A (ja) 1983-10-18 1983-10-18 スパツタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19334583A JPS6086272A (ja) 1983-10-18 1983-10-18 スパツタ装置

Publications (2)

Publication Number Publication Date
JPS6086272A JPS6086272A (ja) 1985-05-15
JPS6365754B2 true JPS6365754B2 (enExample) 1988-12-16

Family

ID=16306350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19334583A Granted JPS6086272A (ja) 1983-10-18 1983-10-18 スパツタ装置

Country Status (1)

Country Link
JP (1) JPS6086272A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0913169A (ja) * 1995-06-29 1997-01-14 Matsushita Electric Ind Co Ltd スパッタリング装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3613018A1 (de) * 1986-04-17 1987-10-22 Santos Pereira Ribeiro Car Dos Magnetron-zerstaeubungskathode
US5458759A (en) * 1991-08-02 1995-10-17 Anelva Corporation Magnetron sputtering cathode apparatus
WO2006113170A2 (en) * 2005-04-14 2006-10-26 Tango Systems, Inc. Sputtering system
US7682495B2 (en) 2005-04-14 2010-03-23 Tango Systems, Inc. Oscillating magnet in sputtering system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59133370A (ja) * 1983-01-21 1984-07-31 Seiko Instr & Electronics Ltd マグネトロンスパツタ−装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0913169A (ja) * 1995-06-29 1997-01-14 Matsushita Electric Ind Co Ltd スパッタリング装置

Also Published As

Publication number Publication date
JPS6086272A (ja) 1985-05-15

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