JPS6365216U - - Google Patents
Info
- Publication number
- JPS6365216U JPS6365216U JP15965086U JP15965086U JPS6365216U JP S6365216 U JPS6365216 U JP S6365216U JP 15965086 U JP15965086 U JP 15965086U JP 15965086 U JP15965086 U JP 15965086U JP S6365216 U JPS6365216 U JP S6365216U
- Authority
- JP
- Japan
- Prior art keywords
- liquid material
- vaporization
- flow rate
- constant temperature
- control device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011344 liquid material Substances 0.000 claims description 11
- 230000008016 vaporization Effects 0.000 claims description 8
- 238000009834 vaporization Methods 0.000 claims description 7
- 239000012530 fluid Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Nozzles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15965086U JPS6365216U (fr) | 1986-10-17 | 1986-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15965086U JPS6365216U (fr) | 1986-10-17 | 1986-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6365216U true JPS6365216U (fr) | 1988-04-30 |
Family
ID=31084282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15965086U Pending JPS6365216U (fr) | 1986-10-17 | 1986-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6365216U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02129370A (ja) * | 1988-11-08 | 1990-05-17 | Toshiba Corp | Ｃｖｄ装置への液化性原料導入法 |
-
1986
- 1986-10-17 JP JP15965086U patent/JPS6365216U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02129370A (ja) * | 1988-11-08 | 1990-05-17 | Toshiba Corp | Ｃｖｄ装置への液化性原料導入法 |
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