JPS6364066U - - Google Patents

Info

Publication number
JPS6364066U
JPS6364066U JP15808586U JP15808586U JPS6364066U JP S6364066 U JPS6364066 U JP S6364066U JP 15808586 U JP15808586 U JP 15808586U JP 15808586 U JP15808586 U JP 15808586U JP S6364066 U JPS6364066 U JP S6364066U
Authority
JP
Japan
Prior art keywords
gas
flow path
gas flow
guide plate
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15808586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15808586U priority Critical patent/JPS6364066U/ja
Publication of JPS6364066U publication Critical patent/JPS6364066U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)
JP15808586U 1986-10-17 1986-10-17 Pending JPS6364066U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15808586U JPS6364066U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15808586U JPS6364066U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Publications (1)

Publication Number Publication Date
JPS6364066U true JPS6364066U (enrdf_load_stackoverflow) 1988-04-27

Family

ID=31081240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15808586U Pending JPS6364066U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Country Status (1)

Country Link
JP (1) JPS6364066U (enrdf_load_stackoverflow)

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